Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion

Please always quote using this URN: urn:nbn:de:0297-zib-64704
  • We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.

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Author:Martin Hammerschmidt, Martin Weiser, Xavier Garcia Santiago, Lin Zschiedrich, Bernd Bodermann, Sven Burger
Document Type:ZIB-Report
Tag:computational lithography; computational metrology; finite- element methods; nanolithography; nanooptics; optical metrology
MSC-Classification:78-XX OPTICS, ELECTROMAGNETIC THEORY (For quantum optics, see 81V80)
CCS-Classification:J. Computer Applications
PACS-Classification:40.00.00 ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS
Date of first Publication:2017/07/25
Series (Serial Number):ZIB-Report (17-37)
ISSN:1438-0064
Published in:Appeared in: Proc. SPIE 10330, Modeling Aspects in Optical Metrology, (2017)