@techreport{HammerschmidtWeiserSantiagoetal.2017, author = {Martin Hammerschmidt and Martin Weiser and Xavier Garcia Santiago and Lin Zschiedrich and Bernd Bodermann and Sven Burger}, title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion}, institution = {ZIB}, address = {Takustr. 7, 14195 Berlin}, number = {17-37}, language = {eng}, year = {2017} }