OPUS 4 | Search

Overview Statistic: PDF-Downloads (blue) and Frontdoor-Views (gray)

17 search hits

1 to 10

Sort by

Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing (2015)

Agcos, Emil ; Bodermann, Bernd ; Burger, Sven ; Dai, Gaoliang ; Endres, Johannes ; Hansen, Poul-Erik ; Nielson, Lars ; Madsen, Morten ; Heidenreich, Sebastian ; Krumrey, Michael ; Loechel, Bernd ; Probst, Jürgen ; Scholze, Frank ; Soltwisch, Victor ; Wurm, Matthias

Joint Research on Scatterometry and AFM Wafer Metrology (2011)

Bodermann, Bernd ; Buhr, Egbert ; Danzebrink, Hans-Ulrich ; Bär, Markus ; Scholze, Frank ; Krumrey, Michael ; Wurm, Matthias ; Klapetek, Petr ; Hansen, Poul-Erik ; Korpelainen, Virpi ; van Veghel, Marijn ; Yacoot, Andrew ; Siitonen, Samuli ; El Gawhary, Omar ; Burger, Sven ; Saastamoinen, Toni

First steps towards a scatterometry reference standard (2012)

Bodermann, Bernd ; Hansen, Poul-Erik ; Burger, Sven ; Henn, Mark-Alexander ; Gross, Hermann ; Bär, Markus ; Scholze, Frank ; Endres, Johannes ; Wurm, Matthias

Fast simulation method for parameter reconstruction in optical metrology (2013)

Burger, Sven ; Zschiedrich, Lin ; Pomplun, Jan ; Schmidt, Frank ; Bodermann, Bernd

Determination of line profiles on photomasks using DUV, EUV and X-ray scattering (2014)

Scholze, Frank ; Bodermann, Bernd ; Burger, Sven ; Endres, Johannes ; Haase, Anton ; Krumrey, Michael ; Laubis, Christian ; Soltwisch, Victor ; Ullrich, Albrecht ; Wernecke, Jan

Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion (2017)

Hammerschmidt, Martin ; Weiser, Martin ; Santiago, Xavier Garcia ; Zschiedrich, Lin ; Bodermann, Bernd ; Burger, Sven

Numerical investigations of the influence of different commonly applied approximations in scatterometry (2013)

Endres, Johannes ; Burger, Sven ; Wurm, Matthias ; Bodermann, Bernd

Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers (2020)

Siefke, Thomas ; Hurtado, Carol ; Dickmann, Johannes ; Dickmann, Walter ; Käseberg, Tim ; Meyer, Jan ; Burger, Sven ; Zeitner, Uwe ; Bodermann, Bernd ; Kroker, Stefanie

Efficient Bayesian inversion for shape reconstruction of lithography masks (2020)

Farchmin, Nando ; Hammerschmidt, Martin ; Schneider, Philipp-Immanuel ; Wurm, Matthias ; Bodermann, Bernd ; Bär, Markus ; Heidenreich, Sebastian

Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion (2017)

Hammerschmidt, Martin ; Weiser, Martin ; Santiago, Xavier Garcia ; Zschiedrich, Lin ; Bodermann, Bernd ; Burger, Sven

We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.

1 to 10

Diese Webseite verwendet technisch erforderliche Session-Cookies. Durch die weitere Nutzung der Webseite stimmen Sie diesem zu. Unsere Datenschutzerklärung finden Sie hier.