@inproceedings{AgcosBodermannBurgeretal., author = {Agcos, Emil and Bodermann, Bernd and Burger, Sven and Dai, Gaoliang and Endres, Johannes and Hansen, Poul-Erik and Nielson, Lars and Madsen, Morten and Heidenreich, Sebastian and Krumrey, Michael and Loechel, Bernd and Probst, J{\"u}rgen and Scholze, Frank and Soltwisch, Victor and Wurm, Matthias}, title = {Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing}, series = {Proc. SPIE}, volume = {9556}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2190409}, pages = {955610}, language = {en} } @article{BodermannBuhrDanzebrinketal.2011, author = {Bodermann, Bernd and Buhr, Egbert and Danzebrink, Hans-Ulrich and B{\"a}r, Markus and Scholze, Frank and Krumrey, Michael and Wurm, Matthias and Klapetek, Petr and Hansen, Poul-Erik and Korpelainen, Virpi and van Veghel, Marijn and Yacoot, Andrew and Siitonen, Samuli and El Gawhary, Omar and Burger, Sven and Saastamoinen, Toni}, title = {Joint Research on Scatterometry and AFM Wafer Metrology}, series = {AIP Conference Proceedings}, volume = {1395}, journal = {AIP Conference Proceedings}, number = {1}, publisher = {AIP}, doi = {10.1063/1.3657910}, pages = {319 -- 323}, year = {2011}, language = {en} } @inproceedings{BodermannHansenBurgeretal.2012, author = {Bodermann, Bernd and Hansen, Poul-Erik and Burger, Sven and Henn, Mark-Alexander and Gross, Hermann and B{\"a}r, Markus and Scholze, Frank and Endres, Johannes and Wurm, Matthias}, title = {First steps towards a scatterometry reference standard}, series = {Proc. SPIE}, volume = {8466}, booktitle = {Proc. SPIE}, doi = {10.1117/12.929903}, pages = {84660E}, year = {2012}, language = {en} } @article{BurgerZschiedrichPomplunetal.2013, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Bodermann, Bernd}, title = {Fast simulation method for parameter reconstruction in optical metrology}, series = {Proc. SPIE}, volume = {8681}, journal = {Proc. SPIE}, doi = {10.1117/12.2011154}, pages = {868119}, year = {2013}, language = {en} } @inproceedings{ScholzeBodermannBurgeretal., author = {Scholze, Frank and Bodermann, Bernd and Burger, Sven and Endres, Johannes and Haase, Anton and Krumrey, Michael and Laubis, Christian and Soltwisch, Victor and Ullrich, Albrecht and Wernecke, Jan}, title = {Determination of line profiles on photomasks using DUV, EUV and X-ray scattering}, series = {Proc. SPIE}, volume = {9231}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2065941}, pages = {92310M}, language = {en} } @article{HammerschmidtWeiserSantiagoetal., author = {Hammerschmidt, Martin and Weiser, Martin and Santiago, Xavier Garcia and Zschiedrich, Lin and Bodermann, Bernd and Burger, Sven}, title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion}, series = {Proc. SPIE}, volume = {10330}, journal = {Proc. SPIE}, doi = {10.1117/12.2270596}, pages = {1033004}, language = {en} } @article{EndresBurgerWurmetal.2013, author = {Endres, Johannes and Burger, Sven and Wurm, Matthias and Bodermann, Bernd}, title = {Numerical investigations of the influence of different commonly applied approximations in scatterometry}, series = {Proc. SPIE}, volume = {8789}, journal = {Proc. SPIE}, doi = {10.1117/12.2022108}, pages = {878904}, year = {2013}, language = {en} } @article{SiefkeHurtadoDickmannetal., author = {Siefke, Thomas and Hurtado, Carol and Dickmann, Johannes and Dickmann, Walter and K{\"a}seberg, Tim and Meyer, Jan and Burger, Sven and Zeitner, Uwe and Bodermann, Bernd and Kroker, Stefanie}, title = {Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers}, series = {Opt. Express}, volume = {28}, journal = {Opt. Express}, doi = {10.1364/OE.396044}, pages = {23122}, language = {en} } @article{FarchminHammerschmidtSchneideretal., author = {Farchmin, Nando and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Wurm, Matthias and Bodermann, Bernd and B{\"a}r, Markus and Heidenreich, Sebastian}, title = {Efficient Bayesian inversion for shape reconstruction of lithography masks}, series = {J. Micro/Nanolith. MEMS MOEMS}, volume = {19}, journal = {J. Micro/Nanolith. MEMS MOEMS}, doi = {10.1117/1.JMM.19.2.024001}, pages = {024001}, language = {en} } @misc{HammerschmidtWeiserSantiagoetal., author = {Hammerschmidt, Martin and Weiser, Martin and Santiago, Xavier Garcia and Zschiedrich, Lin and Bodermann, Bernd and Burger, Sven}, title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion}, issn = {1438-0064}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-64704}, abstract = {We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.}, language = {en} } @article{SchneiderManleyKruegeretal., author = {Schneider, Philipp-Immanuel and Manley, Phillip and Kr{\"u}ger, Jan and Zschiedrich, Lin and K{\"o}ning, Rainer and Bodermann, Bernd and Burger, Sven}, title = {Reconstructing phase aberrations for high-precision dimensional microscopy}, series = {Proc. SPIE}, volume = {12137}, journal = {Proc. SPIE}, doi = {10.1117/12.2620762}, pages = {121370I}, language = {en} } @inproceedings{KruegerManleyZschiedrichetal., author = {Kr{\"u}ger, Jan and Manley, Phillip and Zschiedrich, Lin and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and K{\"o}ning, Rainer and Bodermann, Bernd}, title = {Untersuchung des Schwingungseinflusses auf gemessene Punktspreizfunktionen in der optischen Mikroskopie}, series = {Proc. DGaO}, booktitle = {Proc. DGaO}, url = {http://nbn-resolving.de/urn:nbn:de:0287-2022-P005-6}, pages = {P5}, language = {en} } @inproceedings{ManleyKruegerZschiedrichetal., author = {Manley, Phillip and Kr{\"u}ger, Jan and Zschiedrich, Lin and Hammerschmidt, Martin and Bodermann, Bernd and K{\"o}ning, Rainer and Schneider, Philipp-Immanuel}, title = {Elementary, my dear Zernike: model order reduction for accelerating optical dimensional microscopy}, series = {EPJ Web Conf.}, volume = {266}, booktitle = {EPJ Web Conf.}, doi = {10.1051/epjconf/202226610010}, pages = {10010}, language = {en} } @inproceedings{ManleyKruegerBodermannetal., author = {Manley, Phillip and Kr{\"u}ger, Jan and Bodermann, Bernd and K{\"o}ning, Rainer and Heinrich, Andreas and Eder, Christian and Goehnermeier, Aksel and Zeiser, Ulrike and Hammerschmidt, Martin and Zschiedrich, Lin and Schneider, Philipp-Immanuel}, title = {Efficient simulation of microscopic imaging for reconstruction of nanostructures}, series = {Proc. SPIE}, volume = {PC12619}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2673077}, pages = {PC126190B}, language = {en} } @inproceedings{KruegerBodermannKoeningetal., author = {Kr{\"u}ger, Jan and Bodermann, Bernd and K{\"o}ning, Rainer and Manley, Phillip and Zschiedrich, Lin and Schneider, Philipp-Immanuel and Heinrich, Andreas and Eder, Christian and Zeiser, Ulrike and Goehnermeier, Aksel}, title = {On aberration retrieval for optical microscopes in length metrology}, series = {Proc. SPIE}, volume = {PC12619}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2672294}, pages = {PC126190A}, language = {en} }