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Soltwisch, Victor
(11)
Burger, Sven
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Scholze, Frank
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Krumrey, Michael
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Hammerschmidt, Martin
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Schneider, Philipp-Immanuel
(4)
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Determination of line profiles on photomasks using DUV, EUV and X-ray scattering
(2014)
Scholze, Frank
;
Bodermann, Bernd
;
Burger, Sven
;
Endres, Johannes
;
Haase, Anton
;
Krumrey, Michael
;
Laubis, Christian
;
Soltwisch, Victor
;
Ullrich, Albrecht
;
Wernecke, Jan
Correlated diffuse x-ray scattering from periodically nanostructured surfaces
(2016)
Soltwisch, Victor
;
Haase, Anton
;
Wernecke, Jan
;
Probst, Jürgen
;
Schoengen, Max
;
Burger, Sven
;
Krumrey, Michael
;
Scholze, Frank
Scatterometry sensitivity analysis for conical diffraction versus in-plane diffraction geometry with respect to the side wall angle
(2013)
Soltwisch, Victor
;
Burger, Sven
;
Scholze, Frank
Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing
(2015)
Agcos, Emil
;
Bodermann, Bernd
;
Burger, Sven
;
Dai, Gaoliang
;
Endres, Johannes
;
Hansen, Poul-Erik
;
Nielson, Lars
;
Madsen, Morten
;
Heidenreich, Sebastian
;
Krumrey, Michael
;
Loechel, Bernd
;
Probst, Jürgen
;
Scholze, Frank
;
Soltwisch, Victor
;
Wurm, Matthias
Determination of line profile on nanostructured surfaces using EUV and x-ray scattering
(2014)
Soltwisch, Victor
;
Wernecke, Jan
;
Haase, Anton
;
Probst, Jürgen
;
Schoengen, Max
;
Scholze, Frank
;
Pomplun, Jan
;
Burger, Sven
GIXRF and machine learning as metrological tools for shape and element sensitive reconstructions of periodic nanostructures
(2021)
Andrle, Anna
;
Hönicke, Philipp
;
Gwalt, Grzegorz
;
Schneider, Philipp-Immanuel
;
Kayser, Yves
;
Siewert, Frank
;
Soltwisch, Victor
Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction
(2019)
Andrle, Anna
;
Hönicke, Philipp
;
Schneider, Philipp-Immanuel
;
Kayser, Yves
;
Hammerschmidt, Martin
;
Burger, Sven
;
Scholze, Frank
;
Beckhoff, Burkhard
;
Soltwisch, Victor
Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction
(2019)
Schneider, Philipp-Immanuel
;
Santiago, Xavier Garcia
;
Soltwisch, Victor
;
Hammerschmidt, Martin
;
Burger, Sven
;
Rockstuhl, Carsten
Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering
(2020)
Pflüger, Mika
;
Kline, R. Joseph
;
Fernández Herrero, Analia
;
Hammerschmidt, Martin
;
Soltwisch, Victor
;
Krumrey, Michael
Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering [Source Code]
(2020)
Pflüger, Mika
;
Kline, R Joseph
;
Fernández Herrero, Analía
;
Hammerschmidt, Martin
;
Soltwisch, Victor
;
Krumrey, Michael
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