Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion
Zitieren Sie bitte immer diese URN: urn:nbn:de:0297-zib-64704
- We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.
Verfasserangaben: | Martin Hammerschmidt, Martin WeiserORCiD, Xavier Garcia Santiago, Lin Zschiedrich, Bernd Bodermann, Sven BurgerORCiD |
---|---|
Dokumentart: | ZIB-Report |
Freies Schlagwort / Tag: | computational lithography; computational metrology; finite- element methods; nanolithography; nanooptics; optical metrology |
MSC-Klassifikation: | 78-XX OPTICS, ELECTROMAGNETIC THEORY (For quantum optics, see 81V80) |
CCS-Klassifikation: | J. Computer Applications |
PACS-Klassifikation: | 40.00.00 ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS |
Datum der Erstveröffentlichung: | 25.07.2017 |
Schriftenreihe (Bandnummer): | ZIB-Report (17-37) |
ISSN: | 1438-0064 |
Verlagspublikation: | Appeared in: Proc. SPIE 10330, Modeling Aspects in Optical Metrology, (2017) |