Optical Testing of submicron-technology MOSFETs and bipolar transistors
Author: | D. Pogany, C. Fuerboeck, Norbert SeligerORCiD, P. Habas, E. Gornik, S. Kubicek, S. Decoutere |
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URL: | https://ieeexplore.ieee.org/document/1503373 |
Parent Title (English): | European Solid-State Device Research Conference (ESSDERC' 97) |
Editor: | H. Grünbacher |
Document Type: | Conference Proceeding |
Language: | English |
Publication Year: | 1997 |
Page Number: | 4 |
First Page: | 372 |
Last Page: | 375 |
faculties / departments: | Fakultät für Ingenieurwissenschaften |