TY - CONF A1 - Pogany, D. A1 - Fuerboeck, C. A1 - Seliger, Norbert A1 - Habas, P. A1 - Gornik, E. A1 - Kubicek, S. A1 - Decoutere, S. A2 - Grünbacher, H. T1 - Optical Testing of submicron-technology MOSFETs and bipolar transistors T2 - European Solid-State Device Research Conference (ESSDERC' 97) Y1 - 2023 UR - https://opus4.kobv.de/opus4-rosenheim/frontdoor/index/index/docId/2201 UR - https://ieeexplore.ieee.org/document/1503373 SP - 372 EP - 375 ER -