@inproceedings{PoganyFuerboeckSeligeretal.1997, author = {D. Pogany and C. Fuerboeck and Norbert Seliger and P. Habas and E. Gornik and S. Kubicek and S. Decoutere}, title = {Optical Testing of submicron-technology MOSFETs and bipolar transistors}, booktitle = {European Solid-State Device Research Conference (ESSDERC' 97)}, editor = {H. Gr{\"u}nbacher}, pages = {372 -- 375}, url = {https://ieeexplore.ieee.org/document/1503373}, year = {1997}, }