Solving inverse problems appearing in design and metrology of diffractive optical elements by using Bayesian optimization

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Author:Martin Hammerschmidt, Philipp-Immanuel Schneider, Xavier Garcia Santiago, Lin Zschiedrich, Martin WeiserORCiD, Sven BurgerORCiD
Document Type:Article
Parent Title (English):Proc. SPIE
Volume:10694
First Page:1069407
Year of first publication:2018
DOI:https://doi.org/10.1117/12.2315468