TY - JOUR A1 - Hammerschmidt, Martin A1 - Schneider, Philipp-Immanuel A1 - Santiago, Xavier Garcia A1 - Zschiedrich, Lin A1 - Weiser, Martin A1 - Burger, Sven T1 - Solving inverse problems appearing in design and metrology of diffractive optical elements by using Bayesian optimization T2 - Proc. SPIE Y1 - 2018 UR - https://opus4.kobv.de/opus4-zib/frontdoor/index/index/docId/6894 VL - 10694 SP - 1069407 ER -