@article{HammerschmidtSchneiderSantiagoetal.2018, author = {Martin Hammerschmidt and Philipp-Immanuel Schneider and Xavier Garcia Santiago and Lin Zschiedrich and Martin Weiser and Sven Burger}, title = {Solving inverse problems appearing in design and metrology of diffractive optical elements by using Bayesian optimization}, journal = {Proc. SPIE}, volume = {10694}, pages = {1069407}, doi = {10.1117/12.2315468}, year = {2018}, }