Fast simulation method for parameter reconstruction in optical metrology
Author: | Sven BurgerORCiD, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, Bernd Bodermann |
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Document Type: | Article |
Parent Title (English): | Proc. SPIE |
Volume: | 8681 |
First Page: | 868119 |
Year of first publication: | 2013 |
ArXiv Id: | http://arxiv.org/abs/1304.4367 |
DOI: | https://doi.org/10.1117/12.2011154 |