Fast simulation method for parameter reconstruction in optical metrology
| Author: | Sven BurgerORCiD, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, Bernd Bodermann |
|---|---|
| Document Type: | Article |
| Parent Title (English): | Proc. SPIE |
| Volume: | 8681 |
| First Page: | 868119 |
| Year of first publication: | 2013 |
| ArXiv Id: | http://arxiv.org/abs/1304.4367 |
| DOI: | https://doi.org/10.1117/12.2011154 |

