Fast simulation method for parameter reconstruction in optical metrology

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Author:Sven BurgerORCiD, Lin Zschiedrich, Jan Pomplun, Frank Schmidt, Bernd Bodermann
Document Type:Article
Parent Title (English):Proc. SPIE
Volume:8681
First Page:868119
Year of first publication:2013
ArXiv Id:http://arxiv.org/abs/1304.4367
DOI:https://doi.org/10.1117/12.2011154