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Field emission current investigation of p-type and metallized silicon emitters in the frequency domain

  • We investigated two different field emitter arrays consisting of 10×10 p-type and 10×10 undoped Au-coated high aspect ratio silicon tips. The I-V characterization of the p-type sample showed a pronounced saturation for voltages higher than 500 V and a maximum emission current of 39 nA. The metallized sample revealed a FN-like emission up to several μA. The metallized and the p-type sample operating below the saturation region showed high current fluctuations of ±16%. Whereas, the metallized sample with current regulation and the p-type sample in the saturation yielded a current stability of ±0.4% and ±0.3%, respectively. Investigations in the frequency domain revealed the for field emission typical 1/f-noise. By operating in the saturation region (p-type sample) or using an emission current regulation (metallized sample) the noise level was reduced by at least 20 dB. Finally, the p-type sample was illuminated by a light emitting diode to increase and modulate the emission current in the saturation region. The emission current was increased by a factor of 3.7 to 145 nA. With this configuration we emulated an unstable emission behavior and evaluated the performance of our emission current regulation circuit.

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Metadaten
Author:Christoph LangerORCiD, Matthias HausladenORCiD, Christian PrommesbergerORCiD, Robert Damian ŁawrowskiORCiD, Michael BachmannORCiD, Felix Düsberg, Andreas Pahlke, Mikhail Shamonin (Chamonine)ORCiDGND, Rupert SchreinerORCiDGND
DOI:https://doi.org/10.1109/IVNC.2018.8520127
Parent Title (English):International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan
Publisher:IEEE
Document Type:conference proceeding (article)
Language:English
Year of first Publication:2018
Release Date:2021/05/27
Tag:current fluctuation; current stability; field emission; field emission noise; field emitter array; silicon tip
Pagenumber:1-2
Institutes:Fakultät Angewandte Natur- und Kulturwissenschaften
Fakultät Elektro- und Informationstechnik / Labor Intelligente Materialien und Strukturen
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik
Begutachtungsstatus:peer-reviewed
research focus:Sensorik