Backside-Laserprober Technique for Characterisation of Semiconductor Power Devices
Author: | Norbert SeligerORCiD, C. Fuerboeck, P. Habas, D. Pogany, E. Gornik |
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Parent Title (English): | Proceedings of the Seminar Basics and Technology of Electronic Devices |
Document Type: | Part of a Book |
Language: | English |
Publication Year: | 1997 |
Page Number: | 5 |
First Page: | 143 |
Last Page: | 147 |
faculties / departments: | Fakultät für Ingenieurwissenschaften |