An XPS investigation into the chemical structure of deposits formed from hexamethyldisiloxane/oxgen plasmas
Author: | Morgan Alexander, Robert Short, Frank Jones, Manfred StollenwerkORCiD, Gerd Mathar, Jochen Zabold, Walter Michaeli |
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Parent Title (English): | Journal of Materials Science |
Document Type: | Article |
Language: | English |
Year of Completion: | 1996 |
Release Date: | 2019/10/24 |
GND Keyword: | Hexamethyldisiloxan; Plasma |
Volume: | 31 |
First Page: | 1879 |
Last Page: | 1885 |
Urheberrecht: | 0 |
research focus : | Materials / Innovative Material Processing |
Materials / Material Testing & Sensor Technology | |
Licence (German): |