@article{AlexanderShortJonesetal.2019, author = {Morgan Alexander and Robert Short and Frank Jones and Manfred Stollenwerk and Gerd Mathar and Jochen Zabold and Walter Michaeli}, title = {An XPS investigation into the chemical structure of deposits formed from hexamethyldisiloxane/oxgen plasmas}, journal = {Journal of Materials Science}, volume = {31}, pages = {1879 -- 1885}, year = {2019}, }