Efficient micromachining of thin film layers with nanosecond lasers – beam shaping optics improve process quality and enhance throughput
Author: | Christian Bischoff, Stefan RungORCiD, Ralf HellmannORCiD |
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Parent Title (English): | Laser Technik Journal |
Document Type: | Article |
Language: | English |
Year of Completion: | 2012 |
Release Date: | 2014/09/01 |
GND Keyword: | Laser; Nanosekundenbereich; Dünne Schicht |
Volume: | 9 |
Issue: | 5 |
First Page: | 15 |
Last Page: | 20 |
Urheberrecht: | 1 |
research focus : | Intelligent Systems / Intelligent Sensors and Signals |
Materials / Innovative Material Processing | |
Materials / Material Testing & Sensor Technology | |
Licence (German): |