@article{BischoffRungHellmann2012, author = {Christian Bischoff and Stefan Rung and Ralf Hellmann}, title = {Efficient micromachining of thin film layers with nanosecond lasers - beam shaping optics improve process quality and enhance throughput}, journal = {Laser Technik Journal}, volume = {9}, number = {5}, pages = {15 -- 20}, year = {2012}, }