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Fs-laser based hybrid micromachining for polymer micro-opto electrical systems

  • We report on femtosecond laser direct writing of electrically conductive copper structures on transparent cyclic olefin copolymer based planar optical chips. The process is based on a laser-induced reduction of CuO nanoparticles dissolved in a water-soluble resin. Thus generated conductive copper structures are characterized with respect to their chemical composition and electrical resistivity. In addition, the application of ultrashort laser pulses enables a hybrid micromachining approach comprising ablation of polymer substrates and the fabrication of copper patterns in a single laser processing setup. A possible electro-optical application of this approach is demonstrated by employing the copper structures as an electro-thermal microheater in combination with a polymer planar optical Bragg grating sensor. This, in turn, highlights the potential of generating copious micro-opto-electro-mechanical polymer structures for numerous sensing applications ranging from Lab-on-Chip to environmental applications using the presented hybrid micromachining approach.
Metadaten
Author:Gian-Luca Roth, Julian Haubner, Stefan KeferORCiD, Cemal Esen, Ralf HellmannORCiD
DOI:https://doi.org/10.1016/j.optlaseng.2020.106362
Parent Title (English):Optics and Lasers in Engineering
Document Type:Article
Language:English
Year of Completion:2020
Release Date:2020/09/24
GND Keyword:Femtosekundenlaser; Bragg-Reflektor
Volume:137
Issue:10362
First Page:1
Last Page:8
Urheberrecht:0
research focus :Intelligent Systems / Intelligent Sensors and Signals
Materials / Innovative Material Processing
Materials / Material Testing & Sensor Technology
Licence (German):Keine Lizenz - es gilt das deutsche Urheberrecht
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