1 Analytische Chemie; Referenzmaterialien
Filtern
Dokumenttyp
- Zeitschriftenartikel (37) (entfernen)
Schlagworte
- LIBS (12)
- Laser induced plasma (9)
- Plasma modeling (7)
- Plasma diagnostics (5)
- Additive manufacturing (3)
- Plasma chemistry (3)
- Plasma enhanced chemical vapor deposition (3)
- Spectroscopy (3)
- Boltzmann plot (2)
- Chemical vapor deposition (2)
Organisationseinheit der BAM
- 1 Analytische Chemie; Referenzmaterialien (37)
- 1.9 Chemische und optische Sensorik (27)
- 1.3 Instrumentelle Analytik (10)
- 8 Zerstörungsfreie Prüfung (7)
- 8.2 Zerstörungsfreie Prüfmethoden für das Bauwesen (6)
- 1.4 Prozessanalytik (1)
- 5 Werkstofftechnik (1)
- 5.4 Multimateriale Fertigungsprozesse (1)
- 8.0 Abteilungsleitung und andere (1)
- 9 Komponentensicherheit (1)
Important chemical process of reduction of SiF4 by hydrogen is realized in laser induced dielectric breakdown (LIDB) plasma in a gas mixture of SiF4 and H2. The process may be an alternative to a method of Plasma enhanced chemical vapor deposition (PECVD) which is commonly used for production of pure and isotopically pure silicon films. The composition of laser induced plasma in gases SiF4, SiF4 + H2, SiF4 + H2 + Ar at atmospheric pressure is studied and compared to the composition of inductively coupled plasma (ICP) in the same gases but at reduced pressure of 3 Torr. The gaseous products of chemical reactions are inferred from optical emission spectroscopy (OES) and IR spectroscopy. The reaction products of silicon fluoride SiF and fluorosilanes SiHxFy (x, y = 1, 2, 3) in LIDB plasma are observed and confirmed by equilibrium chemistry calculations and simulations of plasma expansion dynamics using a fluid dynamic-chemical plasma model. It is further suggested that chemisorption of fluorinated species like SiFx (x = 1, 2) followed by the surface reaction with H-atoms lead to a formation of silicon-to‑silicon bonds on a substrate surface. A conclusion is drawn that energetic laser
induced plasma can prove efficient for one-step PECVD by hydrogen reduction of SiF4.
Laser-induced breakdown spectroscopy (LIBS) and principal component analysis (PCA) are frequently used for analytical purposes in research and industry, but they seldom are part of the chemistry Curriculum or laboratory exercises. This case study paper describes the combined application of LIBS and PCA during a research internship for an undergraduate student. The instructional method applied was based on a one-on-one mentorship, in which case the learner was engaged in a Research work. The learning activities included theoretical introductions to the LIBS and PCA methods, numerical simulation, experiments, and data analysis.
The study covered three main topics: analysis of LIBS spectra, application of PCA for clustering, and use of PCA for experimental design. The realization of the study was instructive for all parties involved: from the mentorship point of view, it is concluded that the topics can be covered during an internship or developed into a one semester long research-based module of a chemistry program or a final year project. The student, on the other hand, developed profound technical skills in performing experiments and using PCA software for data analysis.
Laser metal deposition is a rapidly evolving method for additive manufacturing that combines high performance and simplified production routine. Quality of production depends on instrumental design and operational parameters that require constant control during the process. In this work, feasibility of using optical spectroscopy as a control method is studied via modeling and experimentally. A simplified thermal model is developed based on the time-dependent diffusion-conduction heat equation and geometrical light collection into detection optics. Intense light emitted by a laser-heated spot moving across a sample surface is collected and processed to yield the temperature and other temperature-related parameters. In a presence of surface defects the temperature field is distorted in a specific manner that depends on a shape and size of the defect. Optical signals produced by such the distorted temperature fields are simulated and verified experimentally using a 3D metal printer and a sample with artificially carved defects. Three quantities are tested as possible metrics for process monitoring: temperature, integral intensity, and correlation coefficient. The shapes of the simulated signals qualitatively agree with the experimental signals; this allows a cautious inference that optical spectroscopy is capable of detecting a defect and, possibly, predicting its character, e.g. inner or protruding.
Im Rahmen des Themenfeldprojektes „Process Monitoring of AM“ (ProMoAM) evaluiert die Bundesanstalt für Materialforschung und -Prüfung (BAM) gegenwärtig die Anwendbarkeit verschiedenster ZfP-Verfahren zur in-situ Prozessüberwachung in der additiven Fertigung (AM) von Metallen in Hinblick auf die Qualitätssicherung.
Einige der wichtigsten Messgrößen sind hierbei die Temperatur des Schmelzbades und die Abkühlrate, welche starken Einfluss auf das Gefüge und die Eigenspannung haben. Aufgrund der Zugänglichkeit zum Werkstück während des Bauprozesses bieten sich optische Verfahren zu Temperaturbestimmung an. Hierbei stellen jedoch u. a. die hohe Bandbreite der zu messenden Temperaturen, die Bestimmung der Emissivität und ihre Änderung bei Phasenübergängen der verwendeten Legierung große experimentelle Herausforderungen dar. Eine weitere Herausforderung stellt für die IR-Spektroskopie die Absorption durch das Schutzgas und weitere optische Elemente dar. Um diese auch in einem industriellen Umfeld kompensieren zu können, wurde eine Methode entwickelt, die das gemessene Spektrum bei der Verfestigung des Werkstoffes als Referenz nutzt. In diesem Beitrag wird die Anwendung dieser Methode für die IR-Spektrometrie als auch Thermografische Messungen beim Laser-Pulver-Auftragschweißen von 316L gezeigt, wobei beide Methoden weiterhin in Hinblick auf ihre individuellen Vor- und
Nachteile miteinander verglichen werden.
Spatiotemporal spectroscopic characterization of plasmas induced by non-orthogonal laser ablation
(2020)
Ablation geometry significantly affects the plasma parameters and the consequent spectroscopic observations in laser-induced breakdown spectroscopy. Nevertheless, plasmas induced by laser ablation under inclined incidence angles are studied to a significantly lesser extent compared to plasmas induced by standard orthogonal ablation. However, inclined ablation is prominent in stand-off applications, such as the Curiosity Mars rover, where the orthogonality of the ablation laser pulse cannot be always secured.
Thus, in this work, we characterize non-orthogonal ablation plasmas by applying plasma imaging, tomography, and spectral measurements. We confirm earlier observations according to which non-orthogonal ablation leads to a laser-induced plasma that consists of two distinct parts: one expanding primarily along the incident laser pulse and one expanding along the normal of the sample surface. Moreover, we confirm that the former emits mainly continuum radiation, while the latter emits mainly sample-specific characteristic radiation. We further investigate and compare the homogeneity of the plasmas and report that inclined ablation affects principally the ionic emissivity of laser-induced plasmas. Overall, our results imply that the decreased fluence resulting from inclined angle ablation and the resulting inhomogeneities of the plasmas must be considered for quantitative LIBS employing non-orthogonal ablation.
Tetrafluorosilane (SF4) and tetrachlorosilane (SiCl4) plasmas have been widely used as a source of either F or Cl for etching silicon or as a source of silicon for deposition of Si-based materials.
Using different combinations of F and Cl in molecules of chlorofluorosilane SiFxCly adds additional flexibility in realization of these processes. Direct synthesis of SiFxCl4-x (x=1, 2, 3) from SiF4 and SiCl4 is thermodynamically forbidden under standard conditions. This restriction is removed in low-temperature plasmas studied in this work: a laser induced dielectric breakdown (LIDB) plasma and steady-state inductively-coupled plasma (ICP). The plasmas differ in many respects including energy content, temperature, and electron density that lead to different ionization/excitation states of plasma species, which are observed from plasma optical emission spectra. IR spectroscopy and mass-spectrometry confirm the formation of three chlorofluorosilanes, SiF3Cl, SiF2Cl2, and SiFCl3 that constitute ~60% in products of LIDB plasma and split 50/50 between SiF3Cl, SiFCl3 and SiF2Cl2. Experimental observations are verified by equilibrium static calculations via the minimization of Gibbs free energy and by dynamic calculations via the chemical-hydrodynamic plasma model of a spherically expanding plasma plume. The both types of calculations qualitatively agree with the results of spectroscopic
analysis and reproduce dominant presence of SiF2Cl2 as the temperature of the gas approaches the room temperature.
The physical plasma parameters, temperature and electron number density, are studied in the RF-IC (RF inductively coupled) discharge at a reduced pressure of 3 Torr in mixtures of MoF6 with Ar, H2 and CH4. The emission spectra of mixtures are investigated. It is shown that in the presence of argon, the concentration of free electrons in plasma and dissociation rate of MoF6 increase. A main role of molecular hydrogen is the generation of atomic hydrogen that binds atomic fuorine and leads to the formation of gaseous and solid products. Exhaust gas mixtures exiting the reactor are analyzed by mass spectrometry. It is shown that for all cases, the conversion of MoF6 into reaction products is close to 100%.
A thermodynamic analysis of the equilibrium composition of MoF6 systems with Ar, H2 and CH4 was carried out and the obtained results are in good agreement with experimentally observed composition of the solid and gas phases. Analysis of solid deposits from mixture MoF6/H2/Ar revealed the presence of molybdenum powder and large amount of amorphous MoFx. The deposit obtained from mixtures with methane, MoF6/H2/Ar/CH4, contained crystalline molybdenum carbide, Mo3C2.
The review mainly deals with two topics that became important in applications of laser-induced breakdown spectroscopy (LIBS) in recent years: the emission of halogen- and rare-earth-containing molecules and selective excitation of molecules by molecular laser-induced fluorescence (MLIF). The first topic is related to the emission of alkaline-earth diatomic halides MX, M = Ca, Mg, Ba, Sr and X = F, Cl, Br, and I and rare-earth element (REE) oxides LaO, YO, and ScO. These molecules form in laser-induced plasma (LIP) soon after its ignition and persist for a long time, emitting broad bands in a visible part of the spectrum. They are best detected after relatively long delay times when emission from interfering plasma species (atoms and ions) has already been quenched. Such behavior of molecular spectra allows of using, for their detection, inexpensive CCD detectors equipped with simple electronic or mechanical shutters and low-resolution spectrometers. A main target for analysis by molecular spectroscopy is halogens; these elements are difficult to detect by atomic spectroscopy because their most intense atomic lines lie in the vacuum UV. Therefore, in many situations, emission from CaF and CaCl may provide a substantially more sensitive detection of F and Cl than emission from elemental F and Cl and their ions. This proved to be important in mining and concrete industries and even Mars exploration. A similar situation is observed for REEs; their detection by atomic spectroscopy sometimes fails even despite the abundance of atomic and ionic REEs' lines in the UV-VIS. For example, in minerals and rocks with low concentrations of REEs, emission from major and minor mineral elements hinders the weak emission from REEs. Many REEs do not form molecules that show strong emission bands in LIP but can still be detected with the aid of LIP. All REEs except La, Y, and Sc exhibit long-lived luminescence in solid matrices that is easily excited by LIP. The luminescence can be detected simultaneously with molecular emission of species in LIP within the same time and spectral window. The second topic is related to the combination of MLIF and LIBS, which is a technique that was proved to be efficient for analysis of isotopic molecules in LIP. For example, the characteristic spectral signals from isotopic molecules containing 10B and 11B are easier to detect with MLIF-LIBS than with laser ablation molecular isotopic spectrometry (LAMIS) because MLIF provides strong resonance excitation of only targeted isotopes. The technique is also very efficient in detection of halogen molecules although it requires an additional tunable laser that makes the experimental setup bulky and more expensive.
Die räumlich aufgelöste Heterodyn-Spektroskopie (SHS) kombiniert dispersive und interferometrische Techniken zur Gewinnung spektroskopischer Informationen und kann in einem anpassbaren Instrument realisiert werden. SHS wird für die chemische Analyse von verschiedenen Materialien mit Hilfe der Laser-induzierten Plasmaspektroskopie (LIBS) und der Raman-Spektroskopie eingesetzt.
The composition of hydrogen and hydrogen-methane plasmas containing ~10% of BX₃, SiX₄, GeX₄ (X = F, Cl), SF₆, MoF₆ and WF₆ is calculated for the temperature range ~300-4000 K using the equilibrium chemical model. The calculations provide valuable information about thermodynamic parameters (pressure, temperature) needed for condensation of pure elements (in H₂ plasma) and their carbides (in H₂ + CH₄ plasma) and about intermediate reaction products. Using volatile fluorides for plasma chemical deposition alleviates obtaining monoisotopic elements and their isotopic compounds because fluorine is monoisotopic. PECVD is promising method for one-step conversion of fluorides to elemental isotopes and their carbides. For fluorides, further insight is needed into properties of plasmas supported by different types of discharges.