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Reduced basis method for electromagnetic scattering problem: a case study for FinFETs

  • Optical 3D simulations in many-query and real-time contexts require new solution strategies. We study an adaptive, error controlled reduced basis method for solving parametrized time-harmonic optical scattering problems. Application fields are, among others, design and optimization problems of nano-optical devices as well as inverse problems for parameter reconstructions occurring e. g. in optical metrology. The reduced basis method pre- sented here relies on a finite element modeling of the scattering problem with parametrization of materials, geometries and sources.
Author:Martin Hammerschmidt, Sven Herrmann, Jan Pomplun, Sven BurgerORCiD, Frank Schmidt
Document Type:Article
Parent Title (English):Optical and Quantum Electronics
First Page:250
Year of first publication:2016
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