A rigorous finite-element domain decomposition method for electromagnetic near field simulations
| Author: | Lin Zschiedrich, Sven BurgerORCiD, Achim Schädle, Frank Schmidt |
|---|---|
| Editor: | Harry Levinson, Mircea Dusa |
| Document Type: | In Proceedings |
| Parent Title (English): | Optical Microlithography XXI |
| Volume: | 6924 |
| Publisher: | SPIE |
| Year of first publication: | 2008 |
| DOI: | https://doi.org/10.1117/12.771989 |

