Finite element models of lithographic mask topography
| Author: | Jacek Tyminski, Raluca Popescu, Sven BurgerORCiD, Jan Pomplun, Lin Zschiedrich, Tomoyuki Matsuyama, Tomoya Noda |
|---|---|
| Editor: | W. Conley |
| Document Type: | In Proceedings |
| Parent Title (English): | Proc. SPIE |
| Volume: | 8326 |
| First Page: | 83261B |
| Year of first publication: | 2012 |
| DOI: | https://doi.org/10.1117/12.916957 |

