Finite element models of lithographic mask topography
Author: | Jacek Tyminski, Raluca Popescu, Sven BurgerORCiD, Jan Pomplun, Lin Zschiedrich, Tomoyuki Matsuyama, Tomoya Noda |
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Editor: | W. Conley |
Document Type: | In Proceedings |
Parent Title (English): | Proc. SPIE |
Volume: | 8326 |
First Page: | 83261B |
Year of first publication: | 2012 |
DOI: | https://doi.org/10.1117/12.916957 |