Benchmark of rigorous methods for electromagnetic field simulation
| Author: | Sven BurgerORCiD, Lin Zschiedrich, Frank Schmidt, Peter Evanschitzky, Andreas Erdmann |
|---|---|
| Editor: | H. Kawahira, L. S. Zurbrick |
| Document Type: | In Proceedings |
| Parent Title (English): | Photomask Technology |
| Volume: | 7122 |
| First Page: | 71221 |
| Publisher: | Proc. SPIE |
| Year of first publication: | 2008 |
| URL: | http://dx.doi.org/10.1117/12.801248 |
| DOI: | https://doi.org/10.1117/12.801248 |

