3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method
| Author: | Sven BurgerORCiD, Lin Zschiedrich, Frank Schmidt, Roderick Köhle, Thomas Henkel, Bernd Küchler, Christoph Nölscher |
|---|---|
| Editor: | Harald Bosse |
| Document Type: | In Proceedings |
| Parent Title (English): | Modeling Aspects in Optical Metrology |
| Volume: | 6617 |
| First Page: | 66170V |
| Publisher: | Proc. SPIE |
| Year of first publication: | 2007 |
| DOI: | https://doi.org/10.1117/12.726236 |

