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Internal micro structuring of transparent optical polymers by fs laser

  • Lab-on-chip systems are based on components to transport, mix, separate and analyse small volumes of different fluids. The consecutive integration of more complex functions into a single and compact chip demands on multilayer systems. As the classical production using a stacking and joining of single processed layers is elaborate and limited in terms of multilayer structures, an uprising trend to fabricate those devices is the internal, three dimensional processing of transparent substrates by using ultrashort laser pulses. In this study, we report on the generation of internal hollow architectures created by focused 514nm femtosecond laser pulses inside optical polymer bulk materials of different polymers. The three-dimensional channel layout is implemented by moving the sample using three-dimensional motorized stages, allowing arbitrary complex shaped internal channel architectures. Size and cross sectional shape of a single internal generated microchannel are determined by the intensity distribution of the focal voxel. In particular, we show a comprehensive parameter study to improve this laser process with respect to a higher processing speed and stability.

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Metadaten
Author:Gian-Luca Roth, Cemal Esen, Ralf HellmannORCiD
DOI:https://doi.org/10.1117/12.2543487
Parent Title (English):Laser-based Micro-and Nanoprocessing XIV 2020
Publisher:International Society for Optics and Photonics
Document Type:Conference Proceeding
Language:English
Year of Completion:2020
Release Date:2020/05/05
GND Keyword:Femtosekundenlaser
Volume:11268
First Page:112681L
Urheberrecht:1
research focus :Intelligent Systems / Intelligent Sensors and Signals
Materials / Innovative Material Processing
Licence (German):Keine Lizenz - es gilt das deutsche Urheberrecht
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