Influence of sputtering pressure on the nanostructure and the X-ray reflectivity of iridium coatings

  • Reflective mirror coatings made of iridium are used in X-ray telescopes of the Chandra X-ray Observatory (CXO) launched in 1999 by the National Aeronautics and Space Administration (NASA) to investigate astronomical sources at photon energies below 10. keV. These coatings were produced in a DC magnetron sputtering process and have so far proven their suitability for space-based applications. We are considering in the present paper the processing of thin iridium films for lightweight telescopes using the radio frequency magnetron sputtering technique with an oblique angle deposition. The coating development presented here is focused on the influence of total sputtering pressure on film properties as well as on its impact on the mirror's performance. Characterisation methods such as X-ray diffractometry, X-ray reflectometry, atomic force microscopy and transmission electron microscopy have been used. Correlations between morphology, density, surface micro-roughness, crystal structure of the iridium layer and the expected reflectivity of the X-ray mirror are described and discussed.
Metadaten
Author:Anne-Catherine Probst, Manfred StollenwerkORCiD, Florian Emmerich, Andre Büttner, Sebastian Zeising, Johannes Stadtmüller, Franziska Riethmüller, Veronika Stehlikova, Wen Mingwu, Laura Proserpio, Christine Damm, Bernd Rellinghaus, Thorsten DöhringORCiD
URL:https://doi.org/10.1016/j.surfcoat.2017.10.062
ISSN:0257-8972
Parent Title (English):Surface and Coatings Technology
Document Type:Article
Language:English
Year of Completion:2017
Date of first Publication:2017/10/25
Release Date:2018/09/24
Tag:Iridium; X-ray; coating; microstructure; sputtering
GND Keyword:Iridium; Röntgenteleskop
Volume:2017
Issue:343
First Page:101
Last Page:107
Urheberrecht:1
research focus :Materials / Clean Tech
Materials / Innovative Material Processing
Materials / Material Testing & Sensor Technology
Licence (German):Keine Lizenz - es gilt das deutsche Urheberrecht
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