Chemische Charakterisierung und Spurenanalytik
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Confocal Micro X-ray fluorescence analysis (μXRF) is a powerful method for the destruction-free investigation of the elemental composition of various samples in three dimensions. Quantitative results rely heavily on the transmission properties of polycapillary optics, used in confocal setups.
Different models for the functional correlation between energy and transmission of a polycapillary half-lens are compared with experimental data, established with a monochromatic confocal laboratory setup [1], as well as Monte-Carlo-Simulations [2]. The effect of the different approaches on quantitative results are compared using well known SRMs, ranging from thick samples to thin layers and structured materials.
Along with this the basic principles for quantitative evaluations of XRF spectra taken with confocal setups are presented, and compared with experimental results.