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3D coherence scanning interferometry (CSI) is an optical, non-contact and rapide measurement technique using a defined bandwidth of white light at normal incidence. Based on this operational principle, white light interference microscopy (WLIM) provides three-dimensional surface topometry data up to a resolution of 0.4 μm lateral and 0.1 nm vertical. Three operating modi, i.e. surface, films and advanced films, enable measurements of step heights, roughness, wear volume, cone angle, surface pattern and layer thickness of transparent coatings.
The determination of layer thickness by WLIM requires the knowledge of optical constants, i.e.the refractive index n and the extinction coefficient k. For technical surfaces, data base values - if available at all - have to be determined or validated by spectroscopic ellipsometry (SE). From this oblique incidence technique both optical constants and layer thickness can be derived based on a model for at least semi-transparent coatings. For different layer thicknesses, a
comparison is made between WLIM and SE. Measurement uncertainty is
discussed for both topometric features and layer thickness for different use cases.
Traceability to SI system is ensured by certified standards (PTB/NIST) within a DAkkS DIN EN ISO/IEC 17025:2018 accredited lab.
3D coherence scanning interferometry (CSI) is anoptical, non-contact and rapide measurement technique using a defined bandwidth of white light at normal incidence. White light interference microscopy (WLIM) providest here-dimensional surface topometry data up to a resolution of 0.4 µm lateral and 0.1 nm vertical. Three operating modi, surface, films and advanced films, enable measurements of step heights, roughness, wear volume, cone angle, surface pattern and layer thickness. Traceability to SI system is ensured by certified standards (PTB/NIST) within a DAkkS DIN EN ISO/IEC 17025:2018 accredited lab.
In well-annealed thin polymer films, with non-repulsive polymer/substrate interactions, an irreversibly adsorbed layer is expected to from. These adsorbed layers have shown greate potential for technological applications. However, their growth kinetics and molecular dynamics are still not fully understood. This is partly due to the hard accessibility of these layers in thin films. Here, the irreversibly adsorbed layers of homopolymer thin films are revealed by solvent-leaching experiments. First, the growth kinetics of these layers is investigated as a function of annealing time, annealing temperature, leaching time and the original filme thickness. The film thickness, topography and the quality of the adsorbed layer is controlled by Atomic Force Microscopy (AFM). Secondly, the molecular mobility of the adsorbed layer is investigated by Broadband Dielectric Spectroscopy (BDS). A recently developed nanostructured capacitor arrangement is employed to measure the layer with a free surface. The results are quantitatively compared and discussed with respect to recently published work.
In well-annealed thin polymer films, with non-repulsive polymer/substrate interactions, an irreversibly adsorbed layer is expected to from. These adsorbed layers have shown greate potential for technological applications. However, their growth kinetics and molecular dynamics are still not fully understood. This is partly due to the hard accessibility of these layers in thin films. Here, the irreversibly adsorbed layers of homopolymer thin films are revealed by solvent-leaching experiments. First, the growth kinetics of these layers is investigated as a function of annealing time, annealing temperature, leaching time and the original filme thickness. The film thickness, topography and the quality of the adsorbed layer is controlled by Atomic Force Microscopy (AFM). Secondly, the molecular mobility of the adsorbed layer is investigated by Broadband Dielectric Spectroscopy (BDS). A recently developed nanostructured capacitor arrangement is employed to measure the layer with a free surface. The results are quantitatively compared and discussed with respect to recently published work.
Der Mangel an Anwendungsrichtlinien und Validierungsverfahren für struktur-eingebettete faseroptische Dehnungssensoren, insbesondere auf Faser-Bragg-Gitter (FBG)-Basis, führte bislang dazu, dass diese Sensoren trotz ihrer hervorragenden Eigenschaften im Bereich der kommerziellen Material- und Strukturüberwachung nur in geringem Umfange eingesetzt wurden. Fragen zur Degradation der Sensoren unter Beanspruchung, Alterung durch klimatische Einflüsse und Enthaftung infolge Belastung der Struktur konnten bisher nur theoretisch simuliert oder anhand exemplarischer Proben für einzelne einflussnehmende Parameter im Labor untersucht werden. Die Erfassung des Sensorverhaltens im Bauteil unter komplexen Umwelteinflüssen während des Bauteilbetriebes, um damit eine Aussage zur Zuverlässigkeit der Sensormessdaten zu gewinnen, war bisher nicht möglich.
Im Forschungsprojekt FAMOS² wurde deshalb von 2014 bis 2018 die Realisierung eines Autodiagnoseverfahrens für faseroptische Dehnungssensoren erarbeitet, um die Funktionszuverlässigkeit und Langzeitstabilität der Sensoren während des Bauteilbetriebes innerhalb einer Bauteilstruktur bewerten zu können. Im Rahmen des Forschungsprojektes wurde gezeigt, dass ein FBG-Sensor mit einer speziell angepassten magnetostriktiven Schicht magnetisch so angeregt werden kann, dass mit einer zugeschnittenen Messmethodik zu jedem Zeitpunkt eine Bewertung der Sensorzuverlässigkeit unter Betriebsbedingungen möglich ist. Die auf den Sensor aufgebrachte magnetostriktive Schicht erzeugt bei Anregung mit einem passenden Magnetfeld eine gepulste, synthetische Dehnung. Diese Dehnung steht in einem definierten Verhältnis zum anregenden Magnetfeld und wird optisch über die Verschiebung der Bragg-Wellenlänge ausgelesen. Die Konstanz dieses Verhältnisses stellt dann ein Maß für die korrekte Funktionsfähigkeit des Sensors dar. Das Beschichtungs-verfahren, das magnetische Anregungs- und optische Ausleseverfahren, wie auch die Validierung des Sensors unter Berücksichtigung faseroptischer Effekte wurden während des Projekts konzeptionell entwickelt, aufgebaut und charakterisiert. Qualitativ kann mit diesem Verfahren zunächst eine Gut-/Schlecht-Beurteilung des Sensors vorgenommen werden. Perspektivisch bietet das Verfahren jedoch auch die Möglichkeit, verschiedene Versagensmechanismen bestimmen und klassifizieren zu können. Es zeichnete sich schon während des Projektverlaufs ab, dass sich aus den erzielten Ergebnissen über das Autodiagnoseverfahren hinaus weitere Anwendungsmöglichkeiten für den Einsatz des kombinierten magnetostriktiv-faseroptischen Sensorprinzips, beispielsweise als reiner Magnetfeldsensor, ergeben.
Nach Abschluss dieses Forschungsprojekts besteht nun die Möglichkeit, den Funktionszustand faseroptischer Dehnungssensoren jederzeit unabhängig von Alter, Belastung oder Kenntnis eines Referenzzustands zu einem bestimmten Zeitpunkt bestimmen zu können. Aufbauend auf diesen Ergebnissen können weiterführende Forschungen die Messmethodik vertiefend charakterisieren und weitere Anwendungsfälle erschließen.
Efficient water electrolysis requires highly active electrodes. The activity of corresponding catalytic coatings strongly depends on material properties such as film thickness, crystallinity, electrical conductivity, and chemical surface speciation. Measuring these properties with high accuracy in vacuum-free and nondestructive methods facilitates the elucidation of structure−activity relationships in realistic environments. Here, we report a novel approach to analyze the optical and electrical properties of highly active oxygen evolution reaction (OER) catalysts via spectroscopic ellipsometry (SE). Using a series of differently calcined, mesoporous, templated iridium oxide films as an example, we assess the film thickness, porosity, electrical resistivity, electron concentration, electron mobility, and interband and intraband transition energies by modeling of the optical spectra. Independently performed analyses using scanning electron microscopy, energy-dispersive X-ray spectroscopy, ellipsometric porosimetry, X-ray reflectometry, and absorption spectroscopy indicate a high accuracy of the deduced material properties. A comparison of the derived analytical data from SE, resonant photoemission spectroscopy, X-ray absorption spectroscopy, and X-ray photoelectron spectroscopy with activity measurements of the OER suggests that the intrinsic activity of iridium oxides scales with a shift of the Ir 5d t2g sub-level and an increase of p−d interband transition energies caused by a transition of μ1-OH to μ3-O species.
Ellipsometry-based approach for the characterization of mesoporous thin films for H2 technologies
(2021)
Porous thin layer materials are gaining importance in different fields of technology and pose a challenge to the accurate determination of materials properties important for their function. In this work, we demonstrate a hybrid measurement technique using ellipsometry together with other independent methods for validation. Ellipsometry provides information about the porosity of different mesoporous films (PtRuNP/OMC = 45%; IrOx = 46%) as well as about the pore size (pore radius of ca. 5 nm for PtRuNP/OMC). In addition, the electronic structure of a material, such as intraband transitions of a mesoporous IrOx film, can be identified, which can be used to better understand the mechanisms of chemical processes. In addition, we show that ellipsometry can be used as a scalable imaging and visualization method for quality assurance in production. These require accurate and traceable measurements, with reference materials playing an important role that include porosity and other related properties. We show that our novel analytical methods are useful for improving analytical work in this entire field.
Porous materials play an important role in several fields of technology, especially for energy applications like photovoltaics, electrolysis or batteries. The activity of porous films is affected by properties like porosity, film thickness, chemical composition of the material as well as the crystallinity of the framework. The complex morphology of such porous films constitutes a challenge even for modern analytical techniques and requires new approaches employing the combination/complementation of data of different analytical methods. In this contribution we characterize thin mesoporous iridium-titanium mixed oxide film properties by Electron Probe Microanalysis (EPMA) with energy dispersive X-ray spectroscopy (EDS) at an SEM.
For the determination of porosity of Ir oxide thin films, electron probe microanalysis (EPMA) can be used as part of a combined SEM/EDS/STRATAGem analysis. The mass deposition (in μg cm-2) of films was calculated with the analysis software STRATAGem via k-values measured with EDS. The average density of coated films was obtained from the mass deposition and the film thickness as measured by the cross-section SEM. The porosity was calculated by dividing the average film density by the bulk (theoretical) density of the film material.
Film porosities were counterchecked by spectroscopic ellipsometry (SE) using the Bruggeman effective medium approximation (BEMA).
The results obtained by both analytical approaches/methods used, SEM/EDS/STRATAGem and SE were in good agreement.
Hydrogen features a very high specific energy density and is therefore a promising candidate for clean fuel from renewable resources. Water electrolysis can convert electrical energy into storable and transportable hydrogen gas. Under acidic conditions, platinum is the most active and stable monometallic catalyst for the hydrogen evolution reaction (HER). Yet, platinum is rare and needs to be used efficiently. Here, we report a synthesis concept for colloidal bimetallic platinum–ruthenium and rhodium–ruthenium nanoparticles (PtRuNP, RhRuNP) and their incorporation into ordered mesoporous carbon (OMC) films. The films exhibit high surface area, good electrical conductivity and well-dispersed nanoparticles inside the mesopores. The nanoparticles retain their size, crystallinity and composition during carbonization. In the hydrogen evolution reaction (HER), PtRuNP/OMC catalyst films show up to five times higher activity per Pt than Pt/C/Nafion® and PtRu/C/Nafion® reference catalysts.