Filtern
Erscheinungsjahr
Dokumenttyp
- Zeitschriftenartikel (129)
- Vortrag (68)
- Posterpräsentation (31)
- Beitrag zu einem Tagungsband (29)
- Buchkapitel (10)
- Beitrag zu einem Sammelband (4)
- Monografie (1)
- Video (1)
Schlagworte
- Laser-induced periodic surface structures (LIPSS) (70)
- Femtosecond laser ablation (40)
- Femtosecond laser (32)
- Surface functionalization (31)
- Laser processing (23)
- Laser ablation (19)
- Laser-induced periodic surface structures, LIPSS (12)
- Silicon (12)
- Nanostructures (11)
- Applications (10)
- Oxidation (10)
- Friction (9)
- Radiation protection (9)
- Tribology (9)
- Wear (9)
- Ablation (7)
- Femtosecond laser processing (7)
- Laser-induced X-ray emission (7)
- Laser-induced periodic surface structures (7)
- Microstructures (7)
- Steel (7)
- High-speed optical techniques (6)
- Indium phosphide (6)
- Laser beam effects (6)
- Atomic force microscopy (5)
- Dielectrics (5)
- Electromagnetic scattering (5)
- Raman spectroscopy (5)
- Silicon compounds (5)
- Capillary waves (4)
- Chalcopyrite (4)
- Double-pulse experiments (4)
- Titanium (4)
- Ultrafast optical techniques (4)
- Ultrashort laser material interaction (4)
- Ultrashort laser pulses (4)
- Biofilms (3)
- Damage threshold (3)
- Fluid transport (3)
- Free electron laser (3)
- Glass (3)
- Hard X-ray photoelectron spectroscopy (HAXPES) (3)
- Industrial applications (3)
- LIPSS (3)
- Mach-Zehnder interferometer (3)
- Oberflächenfunktionalisierung (3)
- Optical properties (3)
- Polycarbonate (3)
- Polymer (3)
- Refractive index (3)
- Scanning electron microscopy (3)
- Semiconductor (3)
- Surface morphology (3)
- Surface plasmon polaritons (3)
- Surface structure (3)
- Time-resolved scattering (3)
- Titanium alloy (3)
- Titanium nitride (3)
- Ultrafast laser processing (3)
- Ultrashort pulsed laser (3)
- Wetting (3)
- XANES (3)
- Anodization (2)
- Auger electron spectroscopy (2)
- Cell adhesion (2)
- Chemical analysis (2)
- Cribellate spiders (2)
- Cu(InGa)Se2 (2)
- Direct laser interference patterning (DLIP) (2)
- Doping (2)
- Elemental semiconductors (2)
- Femtosecond (2)
- Femtosecond laser irradiation (2)
- Femtosecond laser patterning (2)
- Finite-difference time-domain calculations (2)
- Fused silica (2)
- Glasses (2)
- Incubation (2)
- Laser (2)
- Laser damage (2)
- Laser-Materialbearbeitung (2)
- Laser-induced forward transfer (2)
- Laser-induced forward transfer (LIFT) (2)
- Laser-induced oxide layer (2)
- Laser-induced x-ray emission (2)
- Light concentration (2)
- Lizard (2)
- Magnesium compounds (2)
- Metals (2)
- Micro solar cell (2)
- Micro solar cells (2)
- Micro-concentrator solar cell (2)
- Microscopy (2)
- Microstructure (2)
- Modelling (2)
- Nanosecond laser (2)
- Nanosecond laser ablation (2)
- Nanostrukturen (2)
- Niobium (2)
- Optical breakdown (2)
- Pacemaker (2)
- Photovoltaics (2)
- Polaritons (2)
- Potassium compounds (2)
- Pump-probe experiments (2)
- Scanning force microscopy (2)
- Secondary hazard (2)
- Selective emitter (2)
- Self-organization (2)
- Semiconductors (2)
- Silica (2)
- Spectroscopic imaging ellipsometry (2)
- Surface modification (2)
- Surface plasmons (2)
- Surface texture (2)
- Surface wetting (2)
- TeO2 (2)
- Tellurium dioxide crystals (2)
- Ti6Al4V alloy (2)
- Time-of-flight mass spectroscopy (2)
- Time-of-flight secondary ion mass spectrometry (ToF-SIMS) (2)
- Time-resolved measurements (2)
- Transmission electron microscopy (2)
- Ultra-short pulse laser processing (2)
- Ultrashort laser processing (2)
- Ultrashort pulse laser processing (2)
- X-ray (2)
- (LIPSS) (1)
- 100Cr6 (1)
- 532 nm wavelength (1)
- ASTM (1)
- Ab initio calculations (1)
- Absorber optimization (1)
- Additive (1)
- Additives (1)
- Advanced applications (1)
- Aluminium (1)
- Amorphization (1)
- Analysis (1)
- Anodic oxidation (1)
- Antiadhesive surfaces (1)
- Antibacterial surfaces (1)
- Antibakterielle Oberflächen (1)
- Antimicrobial (1)
- Application (1)
- Bacteria (1)
- Bacteria-repellent surfaces (1)
- Bacterial adhesion (1)
- Bacterial adhesion tests (1)
- Bariumalumoborosilicate glass (1)
- Bessel-Strahlen (1)
- Biofilm (1)
- Biofilm formation (1)
- Biofilm growth (1)
- Biofilme (1)
- Bioinspiration (1)
- Biomimetic (1)
- Biomimetic surfaces (1)
- Biomometics (1)
- Bionic materials (1)
- Bond lengths (1)
- Bone screws (1)
- Bug (1)
- Bulk metallic glasses (1)
- Bulk temperature (1)
- CIGS (1)
- CIGSe (1)
- CIGSe micro solar cells (1)
- Calamistrum (1)
- Carbon fibers (1)
- Carrier excitation (1)
- Carrier plasmas (1)
- Cell appendages (1)
- Cell-repellent surfaces (1)
- Ceramic matrix composites (1)
- Chalkopyrite (1)
- Chemical analyses (1)
- Coefficient of thermal expansion (1)
- Coherent scattering (1)
- Conduction bands (1)
- Copper indium gallium diselenide (CIGSe) (1)
- Copper-indium-gallium-diselenide (1)
- Crystallization (1)
- Cu(In,Ga)Se2 (1)
- CuInSe2 (1)
- D7755-11 (1)
- Darkfield microscopy (1)
- Debris (1)
- Dentistry (1)
- Diffusion (1)
- Direct laser interference patterning (1)
- Double-pulse (1)
- Drude model (1)
- Dünnschichtsolarzellen (1)
- EDX (1)
- Editorial (1)
- Electrical properties (1)
- Electrochemical treatment (1)
- Electromagnetic radiation (1)
- Electromagnetic theories (1)
- Electron backscattering diffraction (EBSD) (1)
- Electron microscopy (1)
- Electrospinning (1)
- European funding strategies (1)
- F pili (1)
- FS-laser ablation (1)
- Femtosecond laser modifications (1)
- Femtosecond laser pulse (1)
- Femtosecond laser-processing (1)
- Femtosecond phenomena (1)
- Femtosecond pulse laser (1)
- Femtosekunden-Laserablation (1)
- Femtosekundenlaser (1)
- Fluid-flow (1)
- Force distance curve (1)
- Fourier transforms (1)
- Free electron laser (FEL) (1)
- Free electron lasers (1)
- Fs-Laser (1)
- Fs-laser patterning (1)
- Fs-time resolved microscopy (1)
- Functional properties (1)
- Glass structure (1)
- Glass transformation temperature (1)
- Glow-discharge optical emission spectroscopy (1)
- Grain orientation (1)
- Grating (1)
- Heat affected zone (1)
- Heat diffusion (1)
- Hexagonally-arranged nano-protrusions (1)
- Hierarchical structures (1)
- Hydrodynamics (1)
- Implant material (1)
- Indium (1)
- Indium Phosphide (1)
- Indium islands (1)
- Industrial application (1)
- Interferometer (1)
- Ionic liquid (1)
- Isotopes (1)
- LIFT (1)
- Large area structuring (1)
- Laser Machining (1)
- Laser Processing (1)
- Laser induced periodic surface structures (1)
- Laser induced periodic surface structures (LIPSS) (1)
- Laser irradiation (1)
- Laser material processing (1)
- Laser materials processing (1)
- Laser materials-processing applications (1)
- Laser nanostructuring (1)
- Laser radiation effects (1)
- Laser safety (1)
- Laser scanning microscopy (1)
- Laser scribing (1)
- Laser technology (1)
- Laser-induced Periodic Surface Structures (LIPSS) (1)
- Laser-induced amorphization (1)
- Laser-induced damage threshold (1)
- Laser-induced micro- and nanostructures (1)
- Laser-induced nanostructures (1)
- Laser-induced periodic surface strctures (LIPSS) (1)
- Laser-induced periodic surface strcutures (LIPSS) (1)
- Laser-induced periodic surface strcutures, LIPSS (1)
- Laser-induzierte periodische Oberflächen-Nanostrukturen (1)
- Laser-induzierte periodische Oberflächenstrukturen (1)
- Laser-modified surface (1)
- Lasers (1)
- Laserschutz (1)
- Laserstrukturierung (1)
- Light transmission (1)
- Literature survey (1)
- Lizards (1)
- Lubrication (1)
- Material sciences (1)
- Materialbearbeitung (1)
- Matter reorganization (1)
- Matter reorganization theories (1)
- Medical implants (1)
- Melting (1)
- Michelson interferometer (1)
- Micro raman spectroscopy (1)
- Microbial adhesion tests (1)
- Microbial adhesions (1)
- Microconcentrator solar cell (1)
- Micromachining (1)
- Mikrostrukturen (1)
- Molybdenum (1)
- Molybdenum substrate (1)
- Monochromators (1)
- Multicrystalline silicon (1)
- Multiphoton absorption (1)
- Nanofibers (1)
- Nanometrology (1)
- Nanosecond laser irradiation (1)
- Nanosecond pulses (1)
- Nanostrcutures (1)
- Nanostructuring (1)
- Native oxide layer (1)
- Neodymium (1)
- Networks (1)
- Nonlinear lithography (1)
- Nonlinear refractive index (1)
- Oberflächenmodifikation (1)
- Ophthalmology (1)
- Optical coatings (1)
- Optical components (1)
- Optical harmonic generation (1)
- Optical microscopy (1)
- Optical pulse shaping (1)
- Optical scattering (1)
- Optical storage (1)
- Optics at surfaces (1)
- PAG (1)
- Phase mask (1)
- Phase-contrast microscopy (1)
- Photoelektron spectroscopy (1)
- Photovoltaik (1)
- Physical vapor deposition (1)
- Picosecond (1)
- Plasma formation (1)
- Plasma processing (1)
- Polarisation (1)
- Polyethylene (1)
- Polyethylene terephthalate (1)
- Polyimide (1)
- Polymethylmethacrylate (1)
- Potassium-magnesium silicate glass (1)
- Protection housing (1)
- Pulse Laser (1)
- Pulse duration (1)
- Pulse shaping (1)
- Pump-probe (1)
- Quantitative phase-contrast microscopy (1)
- Quarzglas (1)
- Reactive oxygen species (1)
- Reflectivity measurements (1)
- Refractive index engineering (1)
- Reibung (1)
- Reibungsreduktion (1)
- Ripples (1)
- Röntgenemission (1)
- SEM (1)
- Saphir (1)
- Sapphire (1)
- Scanning Auger electron microscopy (1)
- Scanning Force Microscopy (1)
- Scanning/atomic force microscopy (SFM/AFM) (1)
- Scattering (1)
- Second harmonic generation (SHG) (1)
- Second-generation high temperature superconductor technology (1)
- Sekundärstrahlung (1)
- Self-induced transparency (1)
- Semiconductor materials (1)
- Silicate glass systems (1)
- Silicate glasses (1)
- Silicon nitride (1)
- Silicon oxide (1)
- Silicon solar cell (1)
- Simulation (1)
- Sliding (1)
- Solar cell (1)
- Solid lasers (1)
- Solid-state plasma (1)
- Spatial light interference microscopy (1)
- Sputter deposition (1)
- Stiffness (1)
- Strain (1)
- Structural relaxation (1)
- Superconductivity (1)
- Surface (1)
- Surface chemistry (1)
- Surface engineering (1)
- Surface oxidation (1)
- Surface plasmon polariton (1)
- Surface processing (1)
- Surface reflectivity (1)
- Surface structures (1)
- Surface superconductivity (1)
- Theoretical modelling (1)
- Thin films (1)
- Thin-film solar cells (1)
- Threshold of silicon (1)
- Ti6Al4V alloys (1)
- TiAl64V (1)
- Time-of-flight mass spectrometry (TOF-MS) (1)
- Time-offlight secondary ion mass spectrometry (ToF-SIMS) (1)
- Time-resolved analysis (1)
- Time-resolved coherent XUV scattering (1)
- Time-resolved coherent scattering (1)
- Time-resolved microscopy (1)
- Time-resolved reflectivity measurements (1)
- Titanium alloys (1)
- Titanium nitride films (1)
- ToF-SIMS (1)
- Transmission measurements (1)
- Tribologie (1)
- Ultrafast laser excitation (1)
- Ultrafast microscopy (1)
- Ultrafast optics (1)
- Ultrafast phenomena (1)
- Ultrafast scattering (1)
- Ultrakurze Laserpulse (1)
- Ultrakurzpuls-Laser (1)
- Ultrakurzpuls-Laserbearbeitung (1)
- Ultrashort (1)
- Ultrashort lasers (1)
- VUV nanosecond laser ablation (1)
- Verschleiß (1)
- Verschleißreduktion (1)
- X-ray emission (1)
- X-ray emission hazards (1)
- X-ray energies (1)
- X-ray photoelectron spectroscopy (1)
- X-ray spectrum (1)
- XUV scattering (1)
- a-Si/my-Si (1)
- lossy materials (1)
- plasmon lifetime (1)
- second laser (1)
- surface plasmon polaritons (1)
Organisationseinheit der BAM
- 6 Materialchemie (106)
- 6.2 Material- und Oberflächentechnologien (106)
- 9 Komponentensicherheit (16)
- 9.5 Tribologie und Verschleißschutz (16)
- 6.1 Oberflächen- und Dünnschichtanalyse (9)
- 4 Material und Umwelt (8)
- 4.1 Biologische Materialschädigung und Referenzorganismen (8)
- 6.7 Materialsynthese und Design (4)
- 6.6 Physik und chemische Analytik der Polymere (3)
- 5 Werkstofftechnik (1)
Paper des Monats
- ja (3)
Serial interconnection of CIGSe thin film solar modules involves typically glass-side laser patterning of the molybdenum layer (P1 scribe). In this paper we present a working principle of P1 film side patterning. The investigated samples were sputter-deposited onto soda-lime glass substrates. For understanding the fundamental ablation behavior, two kinds of layer systems were studied: on the one hand monolayer systems which are compressively stressed and on the other hand bilayer systems, consisting of a tensile stressed layer on the substrate and a second layer on top. The film-side ablation process was studied using a nanosecond as well as a picosecond laser source. The influence of intrinsic stress was studied by XRD. Time resolved spectroscopy reveals the formation of plasma as important driving mechanism for ablation. It is shown that by proper adaption of the sputter conditions high-quality P1 film side patterning is achieved.
Manufacturing of CIGSe thin film solar modules involves typically one laser structuring step (P1) and two mechanical structuring steps (P2 and P3) for serial interconnection. In our approach, complete laser structuring is successfully demonstrated by application of short nanosecond laser pulses (<10 ns) with a single, visible wavelength of 532 nm. The P1 and the P3 trenches are scribed by induced and direct ablation, respectively. For the P2 scribe, the thermal input of the ns laser pulses is used to transform the CIGSe absorber layer locally into a highly conductive compound to provide proper electrical interconnection. These findings promise further simplification and flexibility to thin film solar cell production.
Light concentration opens up the path to enhanced material efficiency of solar cells via increased conversion efficiency and decreased material requirement. For true material saving, a fabrication method allowing local growth of high quality absorber material is essential. We present two scalable fs-laser based approaches for bottom-up growth of Cu(In,Ga)Se2 micro islands utilizing either site-controlled assembly of In(,Ga) droplets on laser-patterned substrates during physical vapor deposition, or laser-induced forward transfer of (Cu,In,Ga) layers for local precursor arrangement. The Cu(In,Ga)Se2 absorbers formed after selenization can deliver working solar devices showing efficiency enhancement under light concentration.
Laser ablation with femtosecond pulses (130 fs, wavelength 800 nm, repetition rate 2 Hz) was compared with nanosecond-pulse ablation (10 ns, wavelength 266 nm, repetition rate 2.5 Hz) of bariumalumoborosilicate glass in air using the direct focusing technique. Different ablation thresholds and heat-affected zones were observed. The lateral and vertical machining precision was evaluated. Single nanosecond laser pulses in the far UV resulted in a bubble or a circular hole in the centre of the illuminated spot, depending on the applied fluence. The ablation behaviour in the case of near-IR femtosecond pulses contrasted to this. Bubble formation was not detected. It needed repeated pulses at the same spot to modify the surface until material removal could be observed (incubation). Cavity dimensions of less than the beam diameter were achieved in this case.
Periodic self-organization of matter beyond the diffraction limit is a puzzling phenomenon, typical both for surface and bulk ultrashort laser processing. Here we compare the mechanisms of periodic nanostructure formation on the surface and in the bulk of fused silica. We show that volume nanogratings and surface nanoripples having subwavelength periodicity and oriented perpendicular to the laser polarization share the same electromagnetic origin. The nanostructure orientation is defined by the near-field local enhancement in the vicinity of the inhomogeneous scattering centers. The periodicity is attributed to the coherent superposition of the waves scattered at inhomogeneities. Numerical calculations also support the multipulse accumulation nature of nanogratings formation on the surface and inside fused silica. Laser surface processing by multiple laser pulses promotes the transition from the high spatial frequency perpendicularly oriented nanoripples to the low spatial frequency ripples, parallel or perpendicular to the laser polarization. The latter structures also share the electromagnetic origin, but are related to the incident field interference with the scattered far-field of rough non-metallic or transiently metallic surfaces. The characteristic ripple appearances are predicted by combined electromagnetic and thermo-mechanical approaches and supported by SEM images of the final surface morphology and by time-resolved pump-probe diffraction measurements.
The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of fused silica with multiple irradiation sequences of parallel polarized Ti:sapphire femtosecond laser pulse pairs (160 fs pulse duration, 800 nm central wavelength) was studied experimentally. For that purpose, a Michelson interferometer was used to generate near-equal-energy double-pulse sequences allowing the temporal pulse delay between the parallel-polarized individual fs-laser pulses to be varied between 0 and 40 ps with ~0.2 ps temporal resolution. The surface morphologies of the irradiated surface areas were characterized by means of scanning electron and scanning force microscopy. In the sub-ps delay range a strong decrease of the LIPSS periods and the ablation crater depths with the double-pulse delay was observed indicating the importance of the laser-induced free-electron plasma in the conduction band of the solids for the formation of LIPSS.
Given their unique properties, ultrashort laser pulses with durations in the femtosecond to picosecond range currently open new avenues in the field of laser materials processing, resulting in groundbreaking new applications based on laser-induced surface functionalization. This article reviews the usability of temporally distributed energy deposition via double-pulse irradiation in applications based on laser ablation. This includes simple new techniques for surface nanostructuring and improved sensitivities in spectroscopic material analyses.
The formation of laser-induced periodic surface structures (LIPSS) upon irradiation of fused silica with multiple irradiation sequences consisting of five Ti:sapphire femtosecond (fs) laser pulse pairs (150 fs, 800 nm) is studied experimentally. A Michelson interferometer is used to generate near-equal-energy double-pulse sequences with a temporal pulse delay from -20 to +20 ps between the cross-polarized individual fs-laser pulses (~0.2 ps resolution). The results of multiple double-pulse irradiation sequences are characterized by means of Scanning Electron and Scanning Force Microscopy. Specifically in the sub-ps delay domain striking differences in the surface morphologies can be observed, indicating the importance of the laser-induced free-electron plasma in the conduction band of the solids for the formation of LIPSS.
Indium islands on molybdenum coated glass can be grown in ordered arrays by surface structuring using a femtosecond laser. The effect of varying the molybdenum coated glass substrate temperature and the indium deposition rate on island areal density, volume and geometry is investigated and evaluated in a physical vapor deposition (PVD) process. The joined impact of growth conditions and spacing of the femtosecond laser structured spots on the arrangement and morphology of indium islands is demonstrated. The results yield a deeper understanding of the island growth and its precise adjustment to industrial requirements, which is indispensable for a technological application of such structures at a high throughput, for instance as precursors for the preparation of Cu(In,Ga)Se2 micro concentrator solar cells.
A bottom-up approach is presented for the production of arrays of indium islands on a molybdenum layer on glass, which can serve as micro-sized precursors for indium compounds such as copper-indium-gallium-diselenide used in photovoltaics. Femtosecond laser ablation of glass and a subsequent deposition of a molybdenum film or direct laser processing of the molybdenum film both allow the preferential nucleation and growth of indium islands at the predefined locations in a following indium-based physical vapor deposition (PVD) process. A proper choice of laser and deposition parameters ensures the controlled growth of indium islands exclusively at the laser ablated spots. Based on a statistical analysis, these results are compared to the non-structured molybdenum surface, leading to randomly grown indium islands after PVD.