Hydrogen-Containing Amorphous Carbon Layers as Optical Materials in the Near-IR Spectral Range
- Hydrogenated amorphous carbon layers were deposited on various substrates by means of a plasma CVD process with a RF substrate bias as well as an ECR plasma source. The optical properties of the a-C:H layers were obtained via spectroscopic ellipsometry and correlated with their mechanical and chemical properties. The layers from pure RF plasma exhibit a higher absorption constant in the visible spectral range and a higher refractive index. All layers are nearly transparent in the NIR spectral range making them candidates for optical thin layer systems. The laser damage behaviour of the a-C:H layers was investigated with ultrashort pulses. The damage thresholds were consistent with the absorption constants of the layers. Interesting damage morphologies were observed indicating a sensitivity of this experiment to sub-structures in the layer.
Autor*innen: | Andreas HertwigORCiD, Jörg KrügerORCiD, Matthias Weise, Uwe Beck |
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Dokumenttyp: | Zeitschriftenartikel |
Veröffentlichungsform: | Verlagsliteratur |
Sprache: | Englisch |
Titel des übergeordneten Werkes (Englisch): | Plasma processes and polymers |
Jahr der Erstveröffentlichung: | 2007 |
Verlag: | Wiley-VCH Verl. |
Verlagsort: | Weinheim |
Jahrgang/Band: | 4 |
Ausgabe/Heft: | S1 |
Erste Seite: | S76 |
Letzte Seite: | S82 |
Freie Schlagwörter: | Amorphous; Diamond-like carbon; Ellipsometrie; Hydrocarbons; Kohlenstoffschichten; Laser ablation; Laser-Material-Bearbeitung; Optical proper; Optische Konstanten |
ISSN: | 1612-8850 |
ISSN: | 1612-8869 |
Verfügbarkeit des Dokuments: | Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access") |
Bibliotheksstandort: | Sonderstandort: Publica-Schrank |
Datum der Freischaltung: | 19.02.2016 |
Referierte Publikation: | Ja |
Datum der Eintragung als referierte Publikation: | 07.06.2007 |