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The Determination of the Efficiency of Energy Dispersive X-Ray Spectrometers by a New Reference Material

  • A calibration procedure for the detection efficiency of energy dispersive X-ray spectrometers (EDS) used in combination with scanning electron microscopy (SEM) for standardless electron probe microanalysis (EPMA) is presented. The procedure is based on the comparison of X-ray spectra from a reference material (RM) measured with the EDS to be calibrated and a reference EDS. The RM is certified by the line intensities in the X-ray spectrum recorded with a reference EDS and by its composition. The calibration of the reference EDS is performed using synchrotron radiation at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt. Measurement of RM spectra and comparison of the specified line intensities enables a rapid efficiency calibration on most SEMs. The article reports on studies to prepare such a RM and on EDS calibration and proposes a methodology that could be implemented in current spectrometer software to enable the calibration with a minimum of operatorA calibration procedure for the detection efficiency of energy dispersive X-ray spectrometers (EDS) used in combination with scanning electron microscopy (SEM) for standardless electron probe microanalysis (EPMA) is presented. The procedure is based on the comparison of X-ray spectra from a reference material (RM) measured with the EDS to be calibrated and a reference EDS. The RM is certified by the line intensities in the X-ray spectrum recorded with a reference EDS and by its composition. The calibration of the reference EDS is performed using synchrotron radiation at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt. Measurement of RM spectra and comparison of the specified line intensities enables a rapid efficiency calibration on most SEMs. The article reports on studies to prepare such a RM and on EDS calibration and proposes a methodology that could be implemented in current spectrometer software to enable the calibration with a minimum of operator assistance.zeige mehrzeige weniger

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Metadaten
Autor*innen:M. Alvisi, M. Blome, Michael Griepentrog, Vasile-Dan HodoroabaORCiD, P. Karduck, M. Mostert, M. Nacucchi, Mathias ProcopORCiD, M. Rohde, F. Scholze, P. Statham, R. Terborg, J.-F. Thiot
Dokumenttyp:Zeitschriftenartikel
Veröffentlichungsform:Verlagsliteratur
Sprache:Englisch
Titel des übergeordneten Werkes (Englisch):Microscopy and microanalysis
Jahr der Erstveröffentlichung:2006
Herausgeber (Institution):Microscopy Society of America
Verlag:Cambridge University Press
Verlagsort:New York, NY
Jahrgang/Band:12
Ausgabe/Heft:5
Erste Seite:406
Letzte Seite:415
Freie Schlagwörter:Detection efficiency; Energy dispersive X-ray spectrometry; Spectrometer calibration; Standardless analysis; X-ray detectors
DOI:10.1017/S1431927606060557
ISSN:1431-9276
ISSN:1435-8115
Verfügbarkeit des Dokuments:Physisches Exemplar in der Bibliothek der BAM vorhanden ("Hardcopy Access")
Bibliotheksstandort:Sonderstandort: Publica-Schrank
Datum der Freischaltung:19.02.2016
Referierte Publikation:Ja
Datum der Eintragung als referierte Publikation:25.09.2006
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