Refine
Year of publication
Document Type
- In Proceedings (148) (remove)
Language
- English (148)
Has Fulltext
- no (148)
Is part of the Bibliography
- no (148)
Institute
Domain decomposition method for electromagnetic scattering problems: application to EUV lithography
(2005)
Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation
(2008)
A rigorous finite-element domain decomposition method for electromagnetic near field simulations
(2008)
Finite-element simulations of light propagation through subwavelength apertures in metal films
(2009)