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Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation
(2008)
3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films
(2009)
Finite-element based electromagnetic field simulations: Benchmark results for isolated structures
(2013)
Adaptive sampling strategies for effcient parameter scans in nano-photonic device simulations
(2014)