Determination of line profile on nanostructured surfaces using EUV and x-ray scattering
Author: | Victor Soltwisch, Jan Wernecke, Anton Haase, Jürgen Probst, Max Schoengen, Frank Scholze, Jan Pomplun, Sven BurgerORCiD |
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Document Type: | In Proceedings |
Parent Title (English): | Proc. SPIE |
Volume: | 9235 |
First Page: | 92351D |
Year of first publication: | 2014 |
DOI: | https://doi.org/10.1117/12.2066165 |