Investigation on the Emission Behaviour of p-doped Silicon Field Emission Arrays with Individually Controllable Single Tips
- Four individually controllable emission tips consisting of <111> p-Type silicon, were structured on a glass substrate by laser ablation. A matching extraction grid was manufactured in the same manner and aligned with the emitters. The resulting samples were characterized in ultra-high vacuum. As expected, the individual currents show a strong saturation and in the saturation region a considerably lower current fluctuation than n-type silicon due to charge carrier depletion. The individual tips behave completely independent behaviour from each other and the overall emission can be deduced from the sum of the currents through the individual tips.
Author: | Philipp Buchner, Vitali Bomke, Matthias HausladenORCiD, Simon EdlerORCiD, Michael BachmannORCiD, Rupert SchreinerORCiDGND |
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DOI: | https://doi.org/10.1109/IVNC52431.2021.9600756 |
ISBN: | 978-1-6654-2589-6 |
Parent Title (English): | 2021 34th International Vacuum Nanoelectronics Conference (IVNC): 7/5/2021 - 7/9/2021, Lyon, France |
Publisher: | IEEE |
Document Type: | conference proceeding (article) |
Language: | English |
Year of first Publication: | 2021 |
Release Date: | 2022/02/15 |
First Page: | 1 |
Last Page: | 2 |
Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik | |
Begutachtungsstatus: | peer-reviewed |
research focus: | Sensorik |
Licence (German): | Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG |