Influence of adsorbates on the performance of a field emitter array in a high voltage triode setup
- The influence of residual gas pressure on the characteristics of black-Silicon field emitter arrays in a high voltage triode setup is investigated. I-Vcharacteristics at different pressure levels show a decrease of emission current with rising pressure. This can be explained by an increase of the work function and charging of the emitter surface due to adsorbates. The initial characteristics can be restored by heating the FEA up to 110 °C during electron emission. This regeneration procedure enables an extension of the lifetime from about 20 h to 440 h at a residual gas pressure of 10 -5 mbar.
Author: | Simon EdlerORCiD, Walter Hansch, Christian PrommesbergerORCiD, Rupert SchreinerORCiDGND |
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DOI: | https://doi.org/10.1109/IVNC.2018.8520214 |
Parent Title (English): | International Vacuum Nanoelectronics Conference (IVNC), 31st, 2018, Kyoto, Japan |
Publisher: | IEEE |
Document Type: | conference proceeding (article) |
Language: | English |
Year of first Publication: | 2018 |
Release Date: | 2021/05/27 |
Tag: | emission current stability; field emitter array; semiconductor field emission; silicon tips |
Pagenumber: | 1-2 |
Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik | |
Begutachtungsstatus: | peer-reviewed |
research focus: | Sensorik |