Influence of Geometrical Arrangements of Si Tip Arrays Fabricated by Laser Micromachining on their Emission Behaviour
- ensely packed emitters on a field emission array lead typically to mutual shielding. Taking biology as a role model for geometric arrangements could be a way to reduce this effect. For comparison, two electron sources, one with a spiral and a second with conventional rectangular (orthogonal) arranged emitters, were fabricated and investigated. Emission currents of 6 µA in the spiral ordered array and 120 µA in the rectangular array were reached with an extraction voltage of 400 V. From a mid-term measurement over 1 h a current stability of ±8.8 % (spiral) respectively ±5.7 % (rectangular) with a mean degradation of -3.0 µA/h (spiral) and -0.12 µA/h (rectangular) could be observed.
Author: | Matthias HausladenORCiD, Vitali Bomke, Philipp Buchner, Michael BachmannORCiD, Alexandr Knapek, Rupert SchreinerORCiDGND |
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DOI: | https://doi.org/10.1109/IVNC52431.2021.9600717 |
ISBN: | 978-1-6654-2589-6 |
ISSN: | 2380-6311 |
Parent Title (English): | 2021 34th International Vacuum Nanoelectronics Conference (IVNC): 7/5/2021 - 7/9/2021, Lyon, France |
Publisher: | IEEE |
Place of publication: | Piscataway, N.J. |
Document Type: | conference proceeding (article) |
Language: | English |
Year of first Publication: | 2021 |
Release Date: | 2022/02/15 |
Tag: | Fabrication; Field emitter array; Spirals; Stability analysis; Voltage measurement; aperture field; emission grid; laser micromachining; parastichy tip arrangements; silicon field emission |
Institutes: | Fakultät Angewandte Natur- und Kulturwissenschaften |
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik | |
Begutachtungsstatus: | peer-reviewed |
research focus: | Sensorik |
Licence (German): |