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Influence of Geometrical Arrangements of Si Tip Arrays Fabricated by Laser Micromachining on their Emission Behaviour

  • ensely packed emitters on a field emission array lead typically to mutual shielding. Taking biology as a role model for geometric arrangements could be a way to reduce this effect. For comparison, two electron sources, one with a spiral and a second with conventional rectangular (orthogonal) arranged emitters, were fabricated and investigated. Emission currents of 6 µA in the spiral ordered array and 120 µA in the rectangular array were reached with an extraction voltage of 400 V. From a mid-term measurement over 1 h a current stability of ±8.8 % (spiral) respectively ±5.7 % (rectangular) with a mean degradation of -3.0 µA/h (spiral) and -0.12 µA/h (rectangular) could be observed.

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Metadaten
Author:Matthias HausladenORCiD, Vitali Bomke, Philipp Buchner, Michael BachmannORCiD, Alexandr Knapek, Rupert SchreinerORCiDGND
DOI:https://doi.org/10.1109/IVNC52431.2021.9600717
ISBN:978-1-6654-2589-6
ISSN:2380-6311
Parent Title (English):2021 34th International Vacuum Nanoelectronics Conference (IVNC): 7/5/2021 - 7/9/2021, Lyon, France
Publisher:IEEE
Place of publication:Piscataway, N.J.
Document Type:conference proceeding (article)
Language:English
Year of first Publication:2021
Release Date:2022/02/15
Tag:Fabrication; Field emitter array; Spirals; Stability analysis; Voltage measurement; aperture field; emission grid; laser micromachining; parastichy tip arrangements; silicon field emission
Institutes:Fakultät Angewandte Natur- und Kulturwissenschaften
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik
Begutachtungsstatus:peer-reviewed
research focus:Sensorik
Licence (German):Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG
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