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Beta Factor Mapping of Individual Emitting Tips During Integral Operation of Field Emission Arrays

  • Emission uniformity mappings of field emitter arrays provide important insight into degradation mechanisms, but are often laborious, non-integral, costly, or not quantifiable. Here, a low-cost Raspberry Pi HQ camera is used as an extraction anode to quantify the emission distribution in field emitter arrays. A verification measurement using controlled SEM electron beams proves, that current-voltage characteristics of individual emission sites can be determined by combining the integral electrical data with the image data. The characteristics are used to quantify the field enhancement factors of an 30x30 silicon field emitter array during integral operation. Comparison of the field enhancement factor distributions before and after a one-hour constant current operation at 1 µA shows an increase from 50 actively emitting tips before to 156 after the measurement. It is shown, that the distribution of field enhancement factors shifts towards lower values, due to the increasing degradation for high field enhancement tips, especially above 1500.

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Metadaten
Author:Andreas Schels, Florian Herdl, Matthias HausladenORCiD, Dominik Wohlfartsstätter, Michael BachmannORCiD, Simon EdlerORCiD, Felix Düsberg, Andreas Pahlke, Philipp Buchner, Rupert SchreinerORCiDGND, Walter Hansch
DOI:https://doi.org/10.1109/IVNC57695.2023.10188957
ISBN:979-8-3503-0143-4
Parent Title (English):2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC), 10-13 July 2023, Cambridge, MA, USA
Publisher:IEEE
Document Type:conference proceeding (article)
Language:English
Year of first Publication:2023
Release Date:2023/10/17
Tag:CMOS imaging; beta factor; field emission; field emission distribution; field emission imaging; field enhancement factor
First Page:224
Last Page:226
Institutes:Fakultät Angewandte Natur- und Kulturwissenschaften
Fakultät Angewandte Natur- und Kulturwissenschaften / Labor Mikrosensorik
Begutachtungsstatus:peer-reviewed
research focus:Sensorik
Licence (German):Keine Lizenz - Es gilt das deutsche Urheberrecht: § 53 UrhG
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