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We present a domain decomposition approach for the computation of the
electromagnetic field within periodic structures. We use a
Schwarz method with transparent boundary conditions at the interfaces of
the domains. Transparent boundary conditions are approximated by the
perfectly matched layer method (PML). To cope with Wood anomalies
appearing in periodic structures an adaptive strategy to determine
optimal PML parameters is developed. \\ We focus on the application to
typical EUV lithography line masks. Light propagation within the
multi-layer stack of the EUV mask is treated analytically. This results
in a drastic reduction of the computational costs and allows for the
simulation of next generation lithography masks
on a standard personal computer.
The pole condition approach for deriving transparent boundary conditions is extended to the time-dependent, two-dimensional case. Non-physical modes of the solution are identified by the position of poles of the solution's spatial Laplace transform in the complex plane. By requiring the Laplace transform to be analytic on some
problem dependent complex half-plane, these modes can be
suppressed. The resulting algorithm computes a finite number of coefficients of a series expansion of the Laplace transform, thereby providing an approximation to the exact boundary condition. The resulting error decays super-algebraically with the number of coefficients, so relatively few additional degrees of freedom are
sufficient to reduce the error to the level of the discretization error in the interior of the computational domain. The approach shows good results for the Schroedinger and the drift-diffusion equation
but, in contrast to the one-dimensional case, exhibits instabilities for the wave and Klein-Gordon equation. Numerical examples are shown that demonstrate the good performance in the former and the instabilities in the latter case.
In this paper we propose a new finite element realization of the Perfectly Matched
Layer method (PML-method). Our approach allows to deal with a wide class of
polygonal domains and with certain types of inhomogeneous exterior domains.
Among the covered inhomogeneities are open waveguide structures playing an essential
role in integrated optics. We give a detailed insight into implementation
aspects. Numerical examples show exponential convergence behavior to the exact
solution with the thickness of the PML sponge layer.
A new approach to derive transparent boundary conditions (TBCs) for wave, Schrödinger, heat and drift-diffusion equations is presented. It relies on the pole condition and distinguishes between physical reasonable and unreasonable solutions by the location of the singularities of the spatial Laplace transform of the exterior solution. To obtain a numerical algorithm, a Möbius transform is applied to map the Laplace transform onto the unit disc. In the transformed coordinate the solution is expanded into a power series. Finally, equations for the coefficients of the power series are derived. These are coupled to the equation in the interior, and yield transparent boundary conditions.
Numerical results are presented in the last section, showing that the error introduced by the new approximate TBCs decays exponentially in the number of coefficients.