Optical, structural, and functional properties of highly reflective and stable iridium mirror coatings for infrared applications

  • Metallic coatings are essential for numerous optical systems due to their high and broadband refl ectivity in the infrared spectral range. In contrast to well-established (protected)silver and gold mirror coatings, iridium is environmentally durable, referring to ISO 9211-3 and thermally stable up to 600 °C even without protective layers, as demonstrated. Additionally,the optical and related structural properties of atomic layer deposited (ALD) and magnetron sputtered (MS) Ir coatings were investigated using spectrophotometry, FTIR, ellipsometry, WLI,AFM, XRR, XRD, SEM, and electrical resistivity measurements. The properties of Ir ALD and Ir MS coatings diff er due to their topography and microstructure.

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Author:Paul SchmittORCiD, Nadja Felde, Thorsten DöhringORCiD, Manfred StollenwerkORCiD, Ingo Uschmann, Kevin Hanemann, Marie Siegler, Georg Klemm, Nancy Gratzke, Andreas Tünnermann, Stefan Schwinde, Sven Schröder, Adriana Szeghalmi
DOI:https://doi.org/10.1364/OME.447306
Parent Title (English):Optical Materials Express
Document Type:Article
Language:English
Year of Completion:2022
Date of first Publication:2022/02/01
Release Date:2022/02/02
Tag:ALD; Iridium; Sputter; mirror
GND Keyword:Iridium; Beschichtung
Volume:2022
Issue:12 / 2
First Page:545
Last Page:559
Urheberrecht:1
Institutes:Fakultät Ingenieurwissenschaften / Labore / Beschichtungstechnik
research focus :Materials / Innovative Material Processing
Licence (German):Keine Lizenz - es gilt das deutsche Urheberrecht
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