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The progress of the VAMAS Project 16 "Measurement of (relative) number concentration of bimodal silica nanoparticles including deposition from liquid suspension" in TWA 34 Nanoparticle Populations is presented. Follwowing points are discusssed:
- Validate the performance of imaging methods to measure the relative number concentration
• electron microscopy (SEM, TEM) and atomic force microscopy (AFM)
• two modes of bimodal (30 and 60 nm) silica nanoparticles
- Validate the performance of small angle X-ray scattering (SAXS) for the traceable measurement of the number concentration of the two modes.
The progress in the VAMAS Project #15" Measurement of particle size and shape distribution of bipyramidal titania including deposition from liquid suspension" within TWA 34 Nanoparticle Populations is presented with highlight of the following points:
- Determine and compare particle size and shape distribution by means of:
• electron microscopy (SEM, TEM, STEM-in-SEM)
• atomic force microscopy (AFM)
• small angle X-ray scattering (SAXS)
- Determine uncertainty induced by deposition protocol from liquid suspension with comparison to known values from a prior ILC with already deposited nanoparticles on TEM grids.
- Provide comparative validation of protocols for the techniques other than TEM.
One aim of the EMPIR nPSize project 17NRM04 was to develop and validate three classes of candidate reference (test) materials (RTMs), with i) well-defined non-spherical shape, ii) relatively high polydispersity index, and iii) accurate particle concentrations.
To fulfil the requirements of the project, 11 different types of materials were prepared. Following the initial assessment of the materials suitability, nPSize5_PT_UNITO, nPSize6_AC_UNITO and nPSize7_GN_CEA materials were found unsuitable for the project, due to various reasons. PT material was deemed unsuitable due to its predominantly agglomerated nature. AC material contained relatively high amount of impurities (other particle forms). GN material was found too heterogeneous in both the length and width for the purpose of the project. The remaining 8 candidate RTMs were assessed for their homogeneity and stability and used for successful delivery of the associated activities within the nPSize project.
The main outcomes of the EMPIR project nPSize are presented and the suitability of the new capabilities, e.g. reference materials, sample preparation protocols, measurement procedures, and data analysis, to be standardized and implemented in accredited analytical laboratories is discussed. Complementation and/or filling gaps of published and ongoing standardisation projects on size, shape and number concentration measurements under ISO/TC 229/JWG 2 are offered.
The two VAMAS inter-laboratory comparisons resulted from the nSPize project and just started under TWA 34 Nanoparticle Populations (Projects #15 and #16) of bipyramidal TiO2 anatase and bimodal SiO2 nanoparticles are presented in detail.
he main objective of the nPSize project is to improve the measurement capabilities for nanoparticle size based on both measurement methods traceable to SI units and new reference materials. Two basic approaches have been used in order to develop measurement procedures resulting in traceable results of the nanoparticle size distribution: physical modelling for the methods used in the project (TSEM, SEM, AFM and SAXS) and machine learning.
Physical modelling: In this part, the physical models associated with different shape measurements for the techniques TSEM, SEM, AFM and SAXS have been collected and further developed with the aim to simulate the resulting signal as measured by the individual methods. Uncertainties and traceability associated with each model were investigated and evaluated. In the following, the progress on these physical models is reported for each individual method.
Machine Learning modelling: The aim of this part is to use machine learning to enable automatic measurement of nanoparticle shape from expert a-priori information only. No physical model will be used as a-priori information in this task.
The accuracy and traceability of the size results obtained by each technique will be analyzed and compared with the physical modelling. A machine learning database will then be used to create automatic detection algorithms.
In this paper, the accurate determination of the size and size distribution of bipyramidal anatase nanoparticles (NPs) after deposition as single particles on a silicon substrate by correlative Scanning Electron Microscopy (SEM) with Atomic Force Microscopy (AFM) analysis is described as a new measurement procedure for metrological purposes. The knowledge of the exact orientation of the NPs is a crucial step in extracting the real 3D dimensions of the particles. Two approaches are proposed to determine the geometrical orientation of individual nano‐bipyramides: (i) AFM profiling along the long bipyramid axis and (ii) stage tilting followed by SEM imaging. Furthermore, a recently developed method, Transmission Kikuchi Diffraction (TKD), which needs preparation of the crystalline NPs on electron‐transparent substrates such as TEM grids, has been tested with respect to its capability of identifying the geometrical orientation of the individual NPs. With the NPs prepared homogeneously on a TEM grid, the transmission mode in a SEM, i.e., STEM‐in‐SEM (or T‐SEM), can be also applied to extract accurate projection dimensions of the nanoparticles from the same sample area as that analysed by SEM, TKD and possibly AFM. Finally, Small Angle X‐ray Scattering (SAXS) can be used as an ensemble technique able to measure the NPs in liquid suspension and, with ab‐initio knowledge of the NP shape from the descriptive imaging techniques, to provide traceable NP size distribution and particle concentration.
It sounds like being a simple analytical task, it is definitely not. The way toward accurate measurement of the size distribution of nanoparticles (NPs) with complex shape, having a broad size polydispersity, with inhomogeneous chemistry, and with a high degree of agglomeration/aggregation is very challenging for all available analytical methods. Particularly for the NPs with complex shape, the access to the smallest dimension (as e.g. required for regulatory purposes) can be enabled only by using imaging techniques with spatial resolution at the nanoscale. Moreover, the full 3D-chacterisation of the NP shape can be provided either by advanced characterization techniques like 3D-TEM tomography or by correlative analysis, i. e. synergetic/complementary measurement of the same field-of-view of the sample with different probes. Examples of the latter type of analysis are: i) electron microscopy for the lateral dimensions and AFM for the height of the NPs, ii) SEM with STEM-in-SEM (also called T-SEM), iii) Electron Microscopy with TKD (Transmission Kikuchi Diffraction) for determination of the geometrical orientation of crystalline NPs, iv) Raman and SEM for e.g. thickness of graphen flakes, or v) Electron Microscopy for descriptive NP shape and SAXS for the NP concentration, the latter as a NP property able to be measured with higher and higher accuracy. For all these types of measurement, reference NPs are necessary for the validation of the measured size. Particularly non-spherical reference NPs are still missing. Examples of such new reference NPs as characterized by the correlative analyses enumerated above will be presented in detail in the contribution.
This presentation is structured in two parts: i) Hybrid metrology by combining SEM with AFM (N. Feltin) and ii) hybridization and corelative microscopy by SEM, STEM-in-SEM, TEM, EDS, Auger Electron Microscopy, TKD and more (D. Hodoroaba).
The first part is focused on the metrological part of the hybrid measurement SEM-AFM, the second part offers some further possibilities of correlative microscopy of nanoparticles based on practical examples.