6.7 Materialsynthese und Design
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3D coherence scanning interferometry (CSI) is an optical, non-contact and rapide measurement technique using a defined bandwidth of white light at normal incidence. Based on this operational principle, white light interference microscopy (WLIM) provides three-dimensional surface topometry data up to a resolution of 0.4 μm lateral and 0.1 nm vertical. Three operating modi, i.e. surface, films and advanced films, enable measurements of step heights, roughness, wear volume, cone angle, surface pattern and layer thickness of transparent coatings.
The determination of layer thickness by WLIM requires the knowledge of optical constants, i.e.the refractive index n and the extinction coefficient k. For technical surfaces, data base values - if available at all - have to be determined or validated by spectroscopic ellipsometry (SE). From this oblique incidence technique both optical constants and layer thickness can be derived based on a model for at least semi-transparent coatings. For different layer thicknesses, a
comparison is made between WLIM and SE. Measurement uncertainty is
discussed for both topometric features and layer thickness for different use cases.
Traceability to SI system is ensured by certified standards (PTB/NIST) within a DAkkS DIN EN ISO/IEC 17025:2018 accredited lab.
3D coherence scanning interferometry (CSI) is anoptical, non-contact and rapide measurement technique using a defined bandwidth of white light at normal incidence. White light interference microscopy (WLIM) providest here-dimensional surface topometry data up to a resolution of 0.4 µm lateral and 0.1 nm vertical. Three operating modi, surface, films and advanced films, enable measurements of step heights, roughness, wear volume, cone angle, surface pattern and layer thickness. Traceability to SI system is ensured by certified standards (PTB/NIST) within a DAkkS DIN EN ISO/IEC 17025:2018 accredited lab.
Thin mesoporous metal oxide films are versatile and attractive candidates for several energy applications like photovoltaics, electrolysis or batteries. Due to their high surface area and ordered pore structure, mesoporous metal oxides demonstrate higher activities. The performance of the porous films is affected by properties like size and shape of the mesopores as well as the crystallinity of the framework. The exact determination and metrological evaluation of the complex morphology of thin mesoporous films requires a new analytical approach employing to combined data of different analytical methods. In this contribution we present a novel evaluation procedure for spectroscopic ellipsometry (SE) to analyse thin mesoporous iridium oxide films.
Mesoporous iridium oxide films were prepared via dip-coating of a solution containing a triblock-copolymer as structure directing agent and an iridium precursor in ethanol. Deposited films were calcined in air at temperatures between 300 and 600 °C. Their morphology was studied with SEM and an electron probe microanalysis (EPMA)and correlated via SE with a Bruggeman effective medium approximation (BEMA). The developed SE model described the film thickness as well as the porosity.
Figure 1a shows a top-view SEM image of mesoporous IrO2 film calcined at 375 °C. The image reveals that the films exhibit a well-ordered mesopore structure with an average pore diameter of 16 nm and a periodic distance between pore centres of 24 nm (FFT inset). Figure 1b is a parity plot of film thicknesses determined by cross-section SEM versus SE of IrO2 film samples prepared at different calcination temperatures. The porosity from the SE model is in good agreement to the porosity values obtained by EPMA.
The contribution will assess in detail the novel approach to analyse the morphology and porosity of thin metal oxide films with spectroscopic ellipsometry. Moreover, the advantages of the new developed approach will be discussed as well as combination of datasets from multiple measurements to development new methods for innovative energy technologies.
Porous materials play an important role in several fields of technology, especially for energy applications like photovoltaics, electrolysis or batteries. The activity of porous films is affected by properties like porosity, film thickness, chemical composition of the material as well as the crystallinity of the framework. The complex morphology of such porous films constitutes a challenge even for modern analytical techniques and requires new approaches employing the combination/complementation of data of different analytical methods. In this contribution we characterize thin mesoporous iridium-titanium mixed oxide film properties by Electron Probe Microanalysis (EPMA) with energy dispersive X-ray spectroscopy (EDS) at an SEM.
Oberflächenmodifizierte Grundwerkstoffe, insbesondere solche mit funktionellen Schichten, sind in unterschiedlichsten Branchen und Anwendungen anzutreffen. Es werden Quer- und Kalottenschliffe von Einfach- und Mehrschichtsystemen mit Beispielen aus dem Bereich des Korrosions- und Verschleißschutzes sowie dekorativer Anwendungen auf unterschiedlichsten Grundwerkstoffen (X5CrNi1810 Stahl, 100Cr6 Stahl, Hartmetall, ABS und Pappe) vorgestellt. Ebenso vielfältig wie die Grundwerkstoffe sind die Oberflächenmodifizierungen mit Funktionsschichten auf Basis von Nitrierungen, Hartstoffen, diamantähnlichem Kohlenstoff, Metallisierungen und Lackschichten mit Interferenzpigmenten. Neben der Identifikation von Schichtdefekten gilt das Hauptaugenmerk der materialographischen Analyse der Erfüllung der Schichtdickenspezifikation und der Bewertung der Homogenität der Schichtdicke auch bei kritischen Geometrien. Zur Validierung der Schichtdicken- bzw. Längenbestimmung im Querschliff wurde ein Laborvergleichsversuch mit einem Nickel-beschichteten Kupferdraht durchgeführt, den alle der 10 Teilnehmer bestanden.
Ziel des Projektes HARFE (Haftfestigkeit Reproduzierbarkeit Festigkeit) war es, eine Er-höhung der Haft- bzw. Klebfestigkeit auf Niedrigenergie-Polymeren (PE, PP, PTFE) zu erreichen. SENTECH realisierte dazu plasmachemische Oberflächenaktivierungen mit O2 und die Abscheidung von Aluminiumoxidschichten (Al2O3) mittels Atomic Layer Deposition (ALD), wobei die Ellipsometrie zum in-situ Monitoring der ALD-Prozesse diente. Die BAM charakterisierte die modifizierten Oberflächen bezüglich der Oberflächenenergie (OFE) und bestimmte die Verbund- bzw. Klebfestigkeit mittels der Zentrifugentechnologie
Eine Grundanforderung an Bauteile ist deren mechanische Integrität, die als Festigkeit (globale Bauteilbeanspruchung) bzw. Tragfestigkeit (lokale Beanspruchung) zu verstehen ist. Die Bauteilfestigkeit wird wesentlich durch das Materialgefüge bestimmt und kann über die Prüfung der Härte des Grundwerkstoffes lokal erfasst werden. Bei Bauteilverbindungen (z.B. Schweißnähte) ist zudem der Übergangsbereich zwischen den Fügeteilen von besonderem Interesse, bei Passungen oder Gleitlagern sind zudem geringe Rauheiten erforderlich, die oft durch mechanische Oberflächen-bearbeitung realisiert werden. Leichtbauweisen können sowohl über hochfeste Stahllegierungen bei geringem Materialeinsatz als auch über Aluminiumlegierungen realisiert werden. Für unterschied-liche Grundwerkstoffe (X2CrNiMo18-14-3, Co-Cr-W-Ni, AlSi10Mg, X5CrNi1810, ferritische Schweiß-nähte) werden an Quer- und Oberflächenschliffen Änderungen im Gefüge, morphologische Besonderheiten, Härteverläufe sowie Änderungen in den Rauheitskennwerten betrachtet, wie sie im Ergebnis mechanischer Oberflächenbearbeitung, bedingt durch den Herstellungsprozess, die Beanspruchung oder den Fügeprozess auftreten. Zur Validierung der Härtebestimmung wurde ein Laborvergleichsversuch an einer MPA-zertifizierten Härtevergleichsplatte und einer 100Cr6 Referenzprobe durchgeführt, den drei bzw. fünf der insgesamt fünf Teilnehmer bestanden.
Porous materials play an important role in several fields of technology, especially for energy applications like photovoltaics, electrolysis or batteries. The activity of porous films is affected by properties like porosity, film thickness, chemical composition of the material, as well as the crystallinity of the framework. The complex morphology of such porous films constitutes a challenge even for modern analytical techniques and requires new approaches employing the combination/complementation of data of different analytical methods. In this contribution, we characterise thin mesoporous iridium-titanium mixed oxide film properties by electron probe microanalysis (EPMA) with energy-dispersive X-ray spectroscopy (EDS) at an SEM.
Mesoporous iridium oxide - titanium oxide (IrOx-TiOx) films were prepared via dip-coating of a solution containing a triblock-copolymer as structure-directing agent, an iridium precursor as well as a titanium precursor in ethanol. IrOx-TiOx films were synthesized with different amounts of iridium and calcined in air. The SEM micrographs reveal for all films the achievement of a well-ordered mesoporous structure and homogeneous films with thicknesses between 67 nm and 152 nm.
For the determination of film elemental composition and porosity, EPMA can be used as part of a combined SEM/EDS/STRATAGem analysis. Elemental compositions and mass depositions (in μg cm-2) of IrOx-TiOx films were calculated with the thin film analysis Software STRATAGem via k-values measured with SEM/EDS. Pure bulk Ir, TiO2 and Si were measured as references. The average density of the films was obtained from the mass Deposition and the film thickness as measured by cross-section SEM. The porosity was then extracted from the measured average film density divided by a theoretical bulk density. The latter is calculated from the weight fractions of IrOx and TiOx as determined with STRATAGem and the bulk mass densities of IrO2 and TiO2 (rutil) from literature.
The fitting results of the k-values from the STRATAGem software, which are in fair agreement with the measured k-values.
The application of the SEM/EDS/STRATAGem approach for accurate porosity determination on pure mesoporous TiOx films and pure porous IrOx films has been recently demonstrated.
The porosities of pure IrOx, TiOx and mixed IrOx-TiOx films in this study have been determined. The contribution will assess in detail the advantages and limitations of the combined SEM/EDS/STRATAGem analysis for the morphology and porosity of thin metal oxide films. Moreover, the comparison with other measurement techniques and the combination of datasets from multiple measurements will be discussed.
For the determination of porosity of Ir oxide thin films, electron probe microanalysis (EPMA) can be used as part of a combined SEM/EDS/STRATAGem analysis. The mass deposition (in μg cm-2) of films was calculated with the analysis software STRATAGem via k-values measured with EDS. The average density of coated films was obtained from the mass deposition and the film thickness as measured by the cross-section SEM. The porosity was calculated by dividing the average film density by the bulk (theoretical) density of the film material.
Film porosities were counterchecked by spectroscopic ellipsometry (SE) using the Bruggeman effective medium approximation (BEMA).
The results obtained by both analytical approaches/methods used, SEM/EDS/STRATAGem and SE were in good agreement.