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In this study, a new direct functionalization method of silicon nitride (Si3N4) using azidation and click chemistry is presented. First, amino groups (NHx) were created on a Si3N4 substrate by fluoride etching. These NHx-terminated Si3N4 surfaces were analyzed by chemical derivatization X-ray photoelectron spectroscopy (CD-XPS) with 4-trifluoromethylbenzaldehyde (TFBA) and a derivatization yield of 20% was concluded. In the second step freshly prepared NHx surfaces were transformed into azides which were used immediately in a click reaction with halogenated alkynes. The presented combination of amination, azidation and click reaction is a promising alternative for common silane-based Si3N4 functionalization methods.
Biosensors are of essential importance in medical and biological diagnostics. Often, they are produced using silane chemistry on glass or silicon oxide surfaces.
However, controlling that silane chemistry is challenging. Here, we present an alternative strategy to form functional organic layers and biosensors on silicon Nitride (Si3N4). H-terminated Si3N4 films are used to generate reactive azide groups by various azidation methods. Biomolecular probes can then be immobilized using click chemistry reactions with the azide groups and due to its high sensitivity in XPS a fluorine-substituted test alkyne was utilized to optimize click chemistry conditions. After that a biotinylated alkyne was clicked to Si3N4 surfaces followed by immobilization of streptavidin as analyte in a model assay. The functionalized surfaces were thoroughly characterized by surface chemical analysis using X-ray photoelectron spectroscopy (XPS) and near edge X-ray absorption fine structure (NEXAFS)spectroscopy.