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Further progress in the spatial resolution of X-ray microscopes is currently impaired by fundamental limitations in the production of X-ray diffractive lenses. Here, we demonstrate how advanced thin film technologies can be applied to boost the fabrication and characterization of ultrahigh resolution X-ray optics. Specifically, Fresnel zone plates were fabricated by combining electron-beam lithography with atomic layer deposition and focused ion beam induced deposition. They were tested in a scanning transmission X-ray microscope at 1.2 keV photon energy using line pair structures of a sample prepared by metalorganic vapor phase epitaxy. For the first time in X-ray microscopy, features below 10 nm in width were resolved.
Nonclassical crystallization typically occurs via the attachment of individual nanoparticles. Intuitively, materials synthesized via this route should exhibit pronounced surface roughness and porosity as a hallmark of the formation process via particle accretion. Here, we demonstrate that nonclassical mineralization of calcium carbonate allows synthesis of ultra-smooth and dense surfaces with unprece-dented root-mean-square roughness of 0.285 nm, simply by con-trolling the hydration state of the nanosized building blocks using Mg doping. High fidelity coating of corrugated substrates can even be achieved. Nonclassical crystallization can thus lead to space-filling inorganic solid-state materials transgressing the implicit porosity commonly expected for particle-driven self-organization processes.