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For the first time, an ab initio calibration for absolute Mg isotope ratios was carried out, without making any a priori assumptions. All quantities influencing the calibration such as the purity of the enriched isotopes or liquid and solid densities were carefully analysed and their associated uncertainties were considered. A second unique aspect was the preparation of three sets of calibration solutions, which were applied to calibrate three multicollector ICPMS instruments by quantifying the correction factors for instrumental mass discrimination. Those fully calibrated mass spectrometers were then used to determine the absolute Mg isotope ratios in three candidate European Reference Materials (ERM)-AE143, -AE144 and -AE145, with ERM-AE143 becoming the new primary isotopic reference material for absolute isotope ratio and delta measurements. The isotope amount ratios of ERM-AE143 are n(25Mg)/n(24Mg) = 0.126590(20) mol/mol and n(26Mg)/n(24Mg) = 0.139362(43) mol/mol, with the resulting isotope amount fractions of x(24Mg) = 0.789920(46) mol/mol, x(25Mg) = 0.099996(14) mol/ mol and x(26Mg) = 0.110085(28) mol/mol and an atomic weight of Ar(Mg) = 24.305017(73); all uncertainties were stated for k = 2. This isotopic composition is identical within uncertainties to those stated on the NIST SRM 980 certificate. The candidate materials ERM-AE144 and -AE145 are isotopically lighter than ERM-AE143 by 1.6 ‰ and 1.3 ‰, respectively, concerning their n(26Mg)/n(24Mg) ratio. The relative combined standard uncertainties are ≤0.1 ‰ for the isotope ratio n(25Mg)/n(24Mg) and ≤0.15 ‰ for the isotope ratio n(26Mg)/ n(24Mg). In addition to characterizing the new isotopic reference materials, it was demonstrated that commonly used fractionation laws are invalid for correcting Mg isotope ratios in multicollector ICPMS as they result in a bias which is not covered by its associated uncertainty. Depending on their type, fractionation laws create a bias up to several per mil, with the exponential law showing the smallest bias between 0.1 ‰ and 0.7 ‰.
Die Nutzung von Sensortechnologien, insbesondere im Bereich der Gasdetektion mit einem Schwerpunkt auf Wasserstoff, spielt eine entscheidende Rolle in verschiedenen Anwendungsbereichen der Wasserstofftechnologie. Sicherheitsüberwachung, Leckdetektion und Prozesskontrolle gehören zu den prominenten Anwendungsgebieten dieser Sensortechnologien. Ein zentrales Ziel ist die Erkennung von freigesetztem Wasserstoff sowie die genaue Bestimmung des Wasserstoff-Luftverhältnisses mithilfe von Gassensoren. Dies ist von entscheidender Bedeutung, um potenzielle Gefahren frühzeitig zu erkennen und angemessene Maßnahmen zu ergreifen.
Ein weiterer Schwerpunkt dieses Beitrags liegt auf der Analytik und der Verwendung zertifizierter Referenzmaterialien in Verbindung mit Metrologie für die Wasserstoffspeicherung. Dies gewährleistet eine präzise und zuverlässige Charakterisierung von Wasserstoff und unterstützt die Entwicklung sicherer Speichertechnologien. Im Rahmen des Euramet-Vorhabens Metrology for Advanced Hydrogen Storage Solutions (MefHySto) wird eine Kurzvorstellung präsentiert.
Der Vortrag stellt zwei zerstörungsfreie Prüfverfahren zum strukturellen Zustandsüberwachung (Structural Health Monitoring, SHM) für Wasserstofftechnologien vor. Insbesondere die Fehlstellenerkennung mittels geführter Ultraschallwellen spielt eine bedeutende Rolle bei der Lebensdauerüberwachung von Wasserstoffspeichern. Ein weiterer Aspekt ist die Anwendung faseroptischer Sensorik zur Schadensfrüherkennung von Wasserstoffspeichern. Diese zerstörungsfreien Prüfverfahren ermöglichen eine präzise und frühzeitige Identifizierung von Schäden, was die Sicherheit und Effizienz von Wasserstoffspeichersystemen entscheidend verbessert.
A widespread recovery of waste heat requires a cost‐effective production of thermoelectric generators. Thermoelectric oxides are predestined for use at high temperatures. For manufacturing reasons, a multilayer generator design will be easily scalable and cost‐effective. To evaluate the potential of ceramic multilayer technology for that purpose, a multilayer of the promising thermoelectric oxides calcium cobaltite (Ca3Co4O9), calcium manganate (CMO, CaMnO3), and glass–ceramic insulation layers is fabricated. Cracks and reaction layers at the interfaces are observed in the microstructure. The compositions of these reaction layers are identified by energy‐dispersive X‐ray spectroscopy and X‐ray diffraction. Mechanical and thermal properties of all layers are compiled from literature or determined by purposeful sample preparation and testing. Based on this data set, the internal stresses in the multilayer after co‐firing are calculated numerically. It is shown that tensile stresses in the range of 50 MPa occur in the CMO layers. The reaction layers have only a minor influence on the level of these residual stresses. Herein, it is proven that the material system is basically suitable for multilayer generator production, but that the co‐firing process and the layer structure must be adapted to improve densification and reduce the tensile stresses in the CMO.
The sintering behavior and the thermoelectric performance of Ca3Co4O9 multilayer laminates were studied, and a multilayer thermoelectric generator was fabricated. Compacts and multilayer samples with anisotropic microstructure and residual porosity were obtained after conventional sintering at 920 °C, whereas dense and isotropic multilayer samples were prepared by firing at 1200 °C and reoxidation at 900 °C. A hot-pressed sample has a dense and anisotropic microstructure. Samples sintered at 920 °C exhibit low electrical conductivity due to the low density, whereas the Seebeck coefficient is not sensitive to preparation conditions. However, thermal conductivity of multilayers is very low, and, hence acceptable ZT values are obtained. A ransversal multilayer thermoelectric generator (TMLTEG) was fabricated by stacking layers of Ca3Co4O9 green tapes, AgPd conductor printing, and co-firing at 920 °C. The TMLTEG has a power output of 3 mW at ΔT =200 K in the temperature interval of 25 °C to 300 °C.
Manufacturing and deformation behavior of alumina and zirconia helical springs at room temperature
(2023)
Ceramic helical springs with identical dimensions were produced by hard machining from alumina, alumina toughened zirconia (ATZ), and tetragonal zirconia polycrystals (TZP) stabilized with different oxides. According to the results of the spring constant determination under deformation rates of 3 mm/min, the deformation behavior of all ceramic springs obeys to Hook’s law. However, variation of the deformation rate, tests under constant load, and spring recovery behavior revealed differences in the deformation behavior of alumina, TZP, and ATZ springs. Alumina springs exhibited time-independent deformation in all tests. In contrast, anelastic deformation at room temperature was demonstrated in all springs containing TZP. This deformation is completely reversible over a period of several days. Anelastic behavior is particularly pronounced in Y-TZP springs, whereas Ce-TZP springs exhibit comparatively very low but still reliably detectable anelasticity. Oxygen vacancies in the TZP ceramic are considered the most likely explanation for the anelastic behavior of TZP springs at room temperature.
The 5G technology promises real time data transmission for industrial processes, autonomous driving, virtual and augmented reality, E-health applications and many more. The Low Temperature Co-fired Ceramics (LTCC) technology is well suited for the manufacturing of microelectronic components for such applications. Still, improvement of the technology such as further miniaturization is required. This study focuses on the characterization of inner metallization of LTCC multilayer modules, especially on the vertical interconnect access (VIA). Critical considerations for this characterization are delamination, pore clustering in and at the edge of the VIA, deformation, and stacking offset. A LTCC multilayer consisting of a glassy crystalline matrix with silver based VIAs was investigated by synchrotron x-ray tomography (CT). The aim of this study is to propose a multitude of structural characteristic values to maximize the information gained from the available dataset. Data analysis has been done with the open source software ImageJ as well as several additional plugins. The high-resolution CT data was evaluated through 2D slices for accessibility reasons. The segmentation of all 2000 slices to assess the different regions e.g. pores, silver and glass ceramic was done by a supervised machine learning algorithm. A quantitative evaluation of shape, deformation, and porosity of the VIA with respect to its dimensions is presented and the suitability of the characterization approach is assessed.
Zirconium vanadate (ZrV2O7) is a well-known negative thermal expansion (NTE) material that exhibits significant isotropic contraction over a broad temperature range (~150°C < T < 800°C). Therefore, it can be used to create composites with controllable expansion coefficients and prevent thermal stress, fatigue, cracking, and deformation at interfaces. We implement interdisciplinary research to analyze such material. We study the influence of the synthesis methods and their parameters on the sample's purity, crystallinity, and homogeneity. Moreover, we implement ab initio-based vibrational computations with partially treated anharmonicity in combination with experimental methods to follow temperature-induced structural changes and rationalize the negative thermal expansion in this material, including the influence of the local structure disorder.
Zirconium vanadate (ZrV2O7) is a well-known negative thermal expansion (NTE) material which exhibits significant isotropic contraction over a broad temperature range (~150°C < T < 800°C). The linear thermal expansion coefficient of ZrV2O7 is −7.1×10-6 K-. Therefore, it can be used to create composites with controllable expansion coefficients and prevent destruction by thermal shock.
Material characterization, leading to application, requires pure, homogenous samples of high crystallinity via a reliable synthesis route. While there is a selection of described syntheses in the literature, it still needs to be addressed which synthesis route leads to truly pure and homogenous samples. Here, we study the influence of the synthesis methods (solid-state, sol-gel, solvothermal) and their parameters on the sample's purity, crystallinity, and homogeneity. The reproducibility of results and data obtained with scanning electron microscopy (SEM), X-ray diffraction (XRD), differential scanning calorimetry, and thermogravimetric analysis (DSC/TGA) were analyzed extensively. The sol-gel method proves superior to the solid-state method and produces higher-quality samples over varying parameters. Sample purity also plays an important role in NTE micro and macro-scale characterizations that explain the impact of porosity versus structural changes.
Moreover, we implement ab-initio-based vibrational computations with partially treated anharmonicity (quasi-harmonic approximation, temperature-dependent effective harmonic potentials) in combination with experimental methods to follow and rationalize the negative thermal expansion in this material, including the influence of the local structure disorder, microstructure, and defects. Khosrovani et al. and Korthuis et al., in a series of diffraction experiments, attributed the thermal contraction of ZrV2O7 to the transverse thermal motion of oxygen atoms in V-O-V linkages. In addition to previous explanations, we hypothesize that local disorder develops in ZrV2O7 crystals during heating.
We are working on the experimental ZrV2O7 development and discuss difficulties one might face in the process as well as high-quality sample significance in further investigation. The obtained samples are currently used in the ongoing research of structure analysis and the negative thermal expansion mechanism.
Zirconium vanadate (ZrV2O7) is a well-known negative thermal expansion (NTE) material which exhibits significant isotropic contraction over a broad temperature range (~150°C < T < 800°C). The linear thermal expansion coefficient of ZrV2O7 is −7.1×10-6 K-. Therefore, it can be used to create composites with controllable expansion coefficients and prevent destruction by thermal shock.
Material characterization, leading to application, requires pure, homogenous samples of high crystallinity via a reliable synthesis route. While there is a selection of described syntheses in the literature, it still needs to be addressed which synthesis route leads to truly pure and homogenous samples. Here, we study the influence of the synthesis methods (solid-state, sol-gel, solvothermal) and their parameters on the sample's purity, crystallinity, and homogeneity. The reproducibility of results and data obtained with scanning electron microscopy (SEM), X-ray diffraction (XRD), differential scanning calorimetry, and thermogravimetric analysis (DSC/TGA) were analyzed extensively. The sol-gel method proves superior to the solid-state method and produces higher-quality samples over varying parameters. Sample purity also plays an important role in NTE micro and macro-scale characterizations that explain the impact of porosity versus structural changes.
Moreover, we implement ab-initio-based vibrational computations with partially treated anharmonicity (quasi-harmonic approximation, temperature-dependent effective harmonic potentials) in combination with experimental methods to follow and rationalize the negative thermal expansion in this material, including the influence of the local structure disorder, microstructure, and defects. Khosrovani et al. and Korthuis et al., in a series of diffraction experiments, attributed the thermal contraction of ZrV2O7 to the transverse thermal motion of oxygen atoms in V-O-V linkages. In addition to previous explanations, we hypothesize that local disorder develops in ZrV2O7 crystals during heating.
We are working on the experimental ZrV2O7 development and discuss difficulties one might face in the process as well as high-quality sample significance in further investigation. The obtained samples are currently used in the ongoing research of structure analysis and the negative thermal expansion mechanism.
Zirconium vanadate (ZrV2O7) is a well-known negative thermal expansion (NTE) material which exhibits significant isotropic contraction over a broad temperature range (~150°C < T < 800°C). The linear thermal expansion coefficient of ZrV2O7 is −7.1×10-6 K-1. Therefore, it can be used to create composites with controllable expansion coefficients and prevent destruction by thermal shock.
Material characterization, leading to application, requires pure, homogenous samples of high crystallinity via a reliable synthesis route. While there is a selection of described syntheses in the literature, it still needs to be addressed which synthesis route leads to truly pure and homogenous samples. Here, we study the influence of the synthesis methods (solid-state, sol-gel, solvothermal) and their parameters on the sample's purity, crystallinity, and homogeneity. The reproducibility of results and data obtained with scanning electron microscopy (SEM), X-ray diffraction (XRD), differential scanning calorimetry, and thermogravimetric analysis (DSC/TGA) were analyzed extensively. The sol-gel method proves superior to the solid-state method and produces higher-quality samples over varying parameters. Sample purity also plays an important role in NTE micro and macro-scale characterizations that explain the impact of porosity versus structural changes.
Moreover, we implement ab-initio-based vibrational computations with partially treated anharmonicity (quasi-harmonic approximation, temperature-dependent effective harmonic potentials) in combination with experimental methods to follow and rationalize the negative thermal expansion in this material, including the influence of the local structure disorder, microstructure, and defects. Khosrovani et al. and Korthuis et al., in a series of diffraction experiments, attributed the thermal contraction of ZrV2O7 to the transverse thermal motion of oxygen atoms in V-O-V linkages. In addition to previous explanations, we hypothesize that local disorder develops in ZrV2O7 crystals during heating.
We are working on the experimental ZrV2O7 development and discuss difficulties one might face in the process as well as high-quality sample significance in further investigation. The obtained samples are currently used in the ongoing research of structure analysis and the negative thermal expansion mechanism.
We report an appropriate preparation of binary isotope calibration mixtures of the three stable isotopes of magnesium to be used in the ab initio calibration of multicollector mass spectrometers (ICPMS and TIMS). For each of the three possible combinations of binary mixtures ("24Mg" + "25Mg", "24Mg" + "26Mg", and "25Mg" + "26Mg"), three individual setups have been prepared under gravimetric control, each of them with an isotope ratio close to unity, and a total magnesium mass fraction close to 20 mg kg-1. The preparation was designed to occur via an intermediate dilution of a parent solution of a highly purified specimen of the isotopically enriched magnesium materials. For the application as calibration mixtures, a complete uncertainty budget was set up, and is presented and discussed in detail, including the aspects that went into the design of the dilution and mixing approach to minimize uncertainty. The principle parameters for the purpose of the later calibration of the mass spectrometers are the absolute masses of isotopically enriched magnesium materials in the primary calibration mixtures. For the first time relative expanded uncertainties U (k = 2) for these masses of ≤0.005% could be achieved for all mixtures.
Shrinkage measurements of miniaturized low temperature co-fired ceramics (LTCC) samples under load typically lead to collapsing of the samples, which hampers the characterization of shrinkage up to full densification. In this paper, a measurement setup is presented, which allows for in situ shrinkage measurements of practical, large LTCC panels during pressure-assisted sintering in a sintering press. The shrinkage behavior of two commercial LTCC systems (GreenTape 951 and Ceramtape GC) has been measured under loads of up to 1 MPa. No crushing of the specimens was observed and reproducible characterization of shrinkage up to full densification has been performed. Based on comparisons to thermomechanical analyzer measurements in this and other studies, it was found that the in situ approach is much better suited for shrinkage characterization of LTCC under load.
Reproducibility and accuracy of the method are discussed and practical as well as more academic applications are proposed.
Plane LTCC substrates can be produced in zeroshrinkage technology by pressure-assisted sintering. The application of axial pressure during sintering supports densification, enhances cofiring of different materials, and restrains deformation. However, the sintered surfaces are affected by the release tapes and by the setters used in the pressure-assisted sintering process. In this study, the effect of release tape particle size on the surface properties of sintered substrates was investigated. Moreover, the substitution of release tape by the use of a vitreous carbon setter was tested. Surface roughness and sheet resistances of metallic thin films on the respective samples were determined. It was found that the roughness of the substrates is not directly correlated with the adequacy of the surface for thin-film deposition. Compared with a freely sintered sample with an average roughness (Ra) of 0.31 μm, pressure-assisted sintering created smoother surfaces using finegrained release tapes (Ra = 0.18 μm) and rougher surfaces using coarse release tapes (Ra = 0.46 μm). Still, sheet resistances were higher on all sinter-pressed samples. The vitreous carbon setter created unusual trenched surface structures, characterized by varying roughness values and intermediate sheet resistances on the LTCCs tested.
Pressure-assisted sintering (PAS) is an established procedure for the production of low-temperature cofired ceramics (LTCC) without lateral shrinkage and minimal shrinkage tolerances for automotive and high-frequency applications. To develop a feasible model for the prediction of densification during that process, master sintering curves (MSCs) for the commercial LTCC DP951 were generated from thermomechanical analysis (TMA) data in the pressure regime from 2 to 500 kPa. Strain mainly related to creep deformation of the LTCC was identified by evaluation of the strain rate and was discarded for the determination of MSC parameters. It was found that no creep occurred at any pressure up to a relative density of 0.9. Different pressure levels can be modeled with the same activation energy of 400 kJ/mol. Densification curves predicted by the model were in good agreement with experimental data. Based on MSCs, the pressure-assisted master sintering surface was compiled to illustrate the influence of pressure on densification. The results show that the MSC approach is a suitable method to feasibly predict the densification of LTCC during PAS.
A novel process to structure the surfaces of low temperature co-fired ceramics (LTCC) is presented. Lowered and raised structures are formed by hot-embossing with glass-like carbon molds during pressure-assisted sintering. Molding is driven by viscous flow of the LTCC glassy phase above the glass transition temperature. For accurate molding of embossments on the LTCC surface, proper filling of cavities in the glass-like carbon mold is necessary. Therefore, de-airing of the mold cavity has to be assured. Two strategies have been investigated: (i) hot-embossing at 850 °C after termination of LTCC shrinkage with de-airing through vent holes in the mold; and (ii) hot-embossing of open porous LTCC at 775 °C with dense molds, de-airing through pore channels in the LTCC, and subsequent densification by further heating to 850 °C. Circular embossments with 10 mm diameter were molded on a commercially available LTCC (Ceramtape GC, CeramTec GmbH, Marktredwitz, Germany). The sintered height was measured using optical profilometry. Image processing was used to evaluate porosity distributions in the sintered structures. The influence of embossing temperature on LTCC viscosity and mold filling behavior is discussed. Successful molding of 47 µm high raised grids and characters by hot embossing with 0.41 MPa at 775 °C and further heating to 850 °C under constant load is demonstrated. Thereby, the high potential of hot-embossing for precise structuring of LTCC surfaces is illustrated.
Structuring of LTCC Substrates by a Combination of Pressure-Assisted Sintering and Hot Embossing
(2015)
A novel technology for the structuring of low temperature co-fired ceramic (LTCC) surfaces is introduced. The commercial LTCC Ceramtape GC is shaped in a zero-shrinkage process by embossing a glass-like carbon mold into the softened LTCC during pressure-assisted sintering. Diverse raised and lowered structures including rings, grids, and characters were fabricated. It was found that de-airing of mold cavities is crucial for the molding of embossments. De-airing is possible through pore channels in the LTCC if embossing is performed at intermediate temperatures. The influence of LTCC viscosity on the mold filling behavior during the formation of raised structures is discussed. For accurate molding and proper densification of the LTCC, hot embossing with 0.41 MPa at 775 °C and subsequent heating under load to 850 °C is proposed. Embossing of precise, 40 µm deep circular cavities and 50 µm high raised bars and characters is demonstrated. Thereby, the high potential of the hot-embossing process for micro-patterning of LTCC is illustrated.
Structuring of LTCC substrates by a combination of pressure-assisted sintering and hot-embossing
(2015)
A novel technology for the structuring of LTCC surfaces is introduced. The material is shaped in a zero-shrinkage process by embossing a glassy carbon mold into the softened LTCC directly after termination of the shrinkage. Three commercially available LTCC compositions (Ceramtape GC, Heratape CT707, and DP951) were tested. Diverse raised and lowered structures including rings, grids, and characters were fabricated. Different material behavior was observed for the tested compositions. Promising results were achieved with Ceramtape GC. Embossing of precise, 40 µm deep circular cavities and 50 µm high raised characters is demonstrated. Processing of 100 × 100 mm² substrates is possible. DP951 showed very good moldability, but also unwanted material displacement due to evaporating lead. A high displacement capacity but uneven heights of embossed structures were observed on CT707 samples. SEM investigations proved the precise transfer of surface contours from the mold to the LTCC. Thereby, the high potential of the hot-embossing process for micro-patterning of LTCC is illustrated.
Co-firing of low temperature co-fired ceramics (LTCC) and functional ceramics like ferrites is a promising approach to increase the level of integration in future microsystems, and to create new applications for LTCC technology. Besides the development of compatible material combinations, the configuration of the sintering process is an important issue for successful co-firing. A method is presented to derive the linear shrinkage mismatch of a material combination based on density data calculated from the master sintering curves (MSCs) of the individual materials. The influence of the firing profile on the constraint in the combined multilayer can be anticipated using this method. To investigate and improve the co-firing of ferrite and dielectric tape, the shrinkage mismatch with respect to heating rate was studied. A significant reduction of shrinkage mismatch was found for increased heating rates. The calculated results are verified by lateral shrinkage measurements on combined laminates.
Recent advances in the development of high gauge factor thin films for strain gauges prompt the research on advanced substrate materials. A glass ceramic composite has been developed in consideration of a high coefficient of thermal expansion (9.4 ppm/K) and a low modulus of elasticity (82 GPa) for the application as support material for thin-film sensors. In the first part, constantan foil strain gauges were fabricated from this material by tape casting, pressure-assisted sintering, and subsequent lamination of the metal foil on the planar ceramic substrates. The accuracy of the assembled load cells corresponds to accuracy class C6. That qualifies the load cells for the use in automatic packaging units and confirms the applicability of the low-temperature co-fired ceramic (LTCC) substrates for fabrication of accurate strain gauges. In the second part, to facilitate the deposition of thin-film sensor structures to the LTCC substrates, pressure-assisted sintering step is modified using smooth setters instead of release tapes, which resulted in fabrication of substrates with low average surface roughness of 50 nm. Titanium thin films deposited on these substrates as test coatings exhibited low surface resistances of 850 Ω comparable to thin films on commercial alumina thin-film substrates with 920 Ω. The presented material design and advances in manufacturing technology are important to promote the development of high-performance thin-film strain gauges.
Recent advances in the development of high gauge factor thin-films for strain gauges prompt the research on advanced substrate materials. A glass ceramic composite has been developed in consideration of a high coefficient of thermal expansion and a low modulus of elasticity for the application as support material for thin-film sensors. Constantan foil strain gauges were fabricated from this material by tape casting, pressure-assisted sintering and subsequent lamination of the metal foil on the planar ceramic substrates. The sensors were mounted on a strain gauge beam arrangement and load curves and creep behavior were evaluated. The accuracy of the assembled load cells correspond to accuracy class C6. That qualifies the load cells for the use in automatic packaging units and confirms the applicability of the LTCC substrates for fabrication of accurate strain gauges. To facilitate the deposition of thin film sensor structures onto the LTCC substrates, the pressure-assisted sintering technology has been refined. By the use of smooth setters instead of release tapes substrates with minimal surface roughness were fabricated. Metallic thin films deposited on these substrates exhibit low surface resistances comparable to thin films on commercial alumina thin-film substrates. The presented advances in material design and manufacturing technology are important to promote the development of high performance thin-film strain gauges.
Niedrigsinternde Glas-Keramik-Komposite (LTCC, low temperature co-fired ceramics) werden erfolgreich als kompakte, mehrlagige Schaltungsträger in der Automobilindustrie und Hochfrequenztechnik eingesetzt. Dazu werden sie mit Verfahren der Folien- und Multilayertechnik verarbeitet und gemeinsam mit aufgedruckten Metallisierungen bei Temperaturen bis 900 °C co-gesintert. Besonders bei hohen Anforderungen an die Reproduzierbarkeit der Sinterschwindung hat sich das Sintern mit axialer Druckunterstützung etabliert, wodurch unter anderem die Schwindung in der Ebene der Einzelfolien unterdrückt werden kann. Ziel der vorliegenden Arbeit war es, die LTCC-Drucksintertechnologie unter zwei Gesichtspunkten weiterzuentwickeln:
• Erarbeitung eines einfachen und praktikablen Verfahrens zur Modellierung und Simulation des Verfahrens,
• prozessintegrierte Erzeugung maßgeschneiderter, speziell dünnfilmfähiger Oberflächenstrukturen.
Für die Simulation der Sinterung wurde das Modell der Mastersinterkurve ausgewählt. Die Eignung des Modells zur Beschreibung von LTCC-Werkstoffen wird zunächst ohne Druckunterstützung nachgewiesen. Dabei werden die Mastersinterkurven von frei gesinterten Pulverpresslingen und Folienlaminaten, deren Schwindung in der Ebene unterdrückt ist, quantitativ gegenübergestellt. Außerdem wird eine Methode vorgeschlagen und experimentell bestätigt, mit der die Schwindungsfehlpassung von Werkstoffkombinationen bei druckloser Co-Sinterung von berechnet werden kann. Die Modellierung der druckunterstützten Sinterung basiert auf thermomechanischen Analysen eines verbreitet angewendeten, kommerziellen LTCC-Werkstoffs (DuPont GreenTape DP951) im Druckbereich von 2 kPa bis 500 kPa. Die Auswertung der Messwerte und Entwicklung der Mastersinterkurven erfolgt unter Berücksichtigung der Kriechverformung des Werkstoffs unter Druck und wird durch grundlegende Untersuchungen zur für dieses Modell obligatorischen Bestimmung der Aktivierungsenergie ergänzt. Mit einer konstanten Aktivierungsenergie von 400 kJ/mol werden Mastersinterkurven für verschiedene Drücke aufgestellt und mit Anpassungsfunktionen modelliert. Die mit Hilfe der Anpassungsfunktionen simulierten Sinterkurven stimmen gut mit den Messungen überein. Das Modell wird als geeignet und praktikabel bewertet.
Die prozessintegrierte Erzeugung maßgeschneiderter Oberflächenstrukturen erfolgt über die im Drucksinterprozess eingesetzten Brennhilfsmittel. Zur Einstellung gewünschter Rautiefen auf den gesinterten Oberflächen werden Opferfolien aus Al2O3 mit unterschiedlichen Partikelgrößenverteilungen und eine Opferfolie aus hexagonalem BN vorgestellt, die über Rückstandsschichten auf der LTCC-Oberfläche die Oberflächenstruktur bestimmen. Der Zusammenhang von Opferfolieneigenschaften und Oberflächencharakteristika wird an verschiedenen LTCC-Werkstoffen beschrieben. Die Rauheit einer druckgesinterten LTCC-Oberfläche kann über die Partikelgröße der Opferfolien gezielt verändert werden. Zur Herstellung dünnfilmkompatibler, rückstandsfreier Oberflächen im Drucksinterprozess wird glasartiger Kohlenstoff als Brennhilfsmittel eingeführt. Damit wird eine Regelung des Sauerstoffpartialdrucks während des Brandes erforderlich. Eine vollständige thermische Entbinderung der Grünfolien ist aufgrund von Kohlenstoffrückständen auf den Partikeloberflächen erst oberhalb 500 °C möglich. Einflüsse der Prozessparameter Druck und Haltezeit auf die resultierende Oberflächenstruktur werden aufgeklärt und optimale Prozessfenster für die untersuchten Werkstoffe angegeben. Mit dem entwickelten Verfahren können zum ersten Mal verschiedene LTCC-Substrate mit dünnfilmfähigen Oberflächen nacharbeitsfrei durch Drucksintern hergestellt werden.
Die Ergebnisse zur Modellierung und Simulation leisten einen wertvollen Beitrag zur Einsparung von Energie, Zeit und Kosten bei der Gestaltung von Drucksinterprozessen. Die erarbeiteten Brennhilfsmittelkonzepte können ressourcenaufwändige Nacharbeit teilweise ersetzen und eröffnen durch die Dünnfilmeignung der Oberflächen neue Anwendungsgebiete der Drucksintertechnologie in der Sensor und Mikrosystemtechnik.
Aufgrund ihres spezifischen Eigenschaftsprofils sind keramische Federn attraktiv für Spezialanwendungen in Maschinenanlagen, Metrologie und Sensortechnik. Durch Hartbearbeitung keramischer Hohlzylinder können Spiralfedern mit rechteckigem Windungsquerschnitt präzise gefertigt werden. Dabei kann durch gezielte Auslegung der Federgeometrie die Federkonstante über mehrere Größenordnungen variiert werden. Der Vortrag gibt einen Überblick über den Herstellungsprozess, verschiedene Eigenschaften keramischer Federn und Anwendungsbeispiele.
Roughening of zirconia dental implants is a common clinical practice to improve ingrowth behavior. It depends on the manufacturer of the implant at which stage of the manufacturing process and by which method the surface is roughened. Systematic studies on this topic are rarely found in the literature. Therefore, the influence of surface treatment on the strength of a dental zirconia was investigated as part of a research project on the development of ceramic implants. The material under test was a commercial zirconia consisting of a Y-TZP matrix and Ce-TZP inclusions in the sintered state. This material is characterized by a slightly higher fracture toughness and slightly reduced strength compared to typical 3Y-TZP. Sets of samples were sandblasted in the white-fired or sintered condition. The ball-on-three-ball-strength of these samples was measured and compared to the strength of as-fired samples and polished samples. The complete study was performed two times for validation of the results. It is found that the average strength of TZP ceramics differs by almost 500 MPa depending on the surface treatment. Conventionally sintered specimens with as-fired surface exhibit a strength of 880 MPa. Sandblasting in the white fired state reduces the strength to 690 MPa. Both polishing and sandblasting in the sintered condition result in an increase in strength to about 1180 MPa. Comparative microstructural investigations, roughness measurements and X-ray phase analyses were carried out to determine the causes of these huge differences in strength. These findings may challenge the practice of white body surface treatment and give reason for further investigations on other commercial dental TZP materials.
Der Vortrag gibt einen Überblick über die Materialklasse Keramik, insbesondere Technische Keramik. Nach einem kurzen Überblick über typische Anwendungen und Werkstoffe wird die keramische Prozesskette erläutert. Am Beispiel von Festigkeit wird der für Keramik typische, enge Zusammenhang zwischen Technologie, Mikrostruktur und Eigenschaften herausgearbeitet. Daraus werden Anforderungen für eine erfolgreiche Digitalisierung abgeleitet.
Dielectric breakdown of insulators is a combined electrical, thermal, and mechanical failure. The exact breakdown mechanism in ceramics and the formulation of useful models are still subject of investigation. Recent studies highlighted that several experimental aspects of dielectric breakdown strength testing affect the test results, and thus impede the recognition of fundamental principles.
Excess field strength near the electrode can lead to premature breakdown in the insulating liquid. This would cause superficial damage to the test specimen and thus falsify the measurement results.
The field strength distribution is influenced by the ratio of permittivity of the sample and the surrounding insulating liquid. Premature breakdown depends on the breakdown strength of the liquid and the actual test voltage. The test voltage again depends on the specimen thickness.
To systematically investigate these relations, a numerical simulation study (FEM) of the electric field distribution in a typical testing rig with cylindrical electrodes was performed. The permittivity of the sample and the insulating liquid was parameterized, as well as the sample thickness. The electric field distribution was calculated for increasing test voltage. Field strength maxima are compared to experimental breakdown strength of typical insulating liquids and experimental breakdown locations on alumina. Strategies are discussed to adjust the insulation liquid and the sample thickness to reduce the influence of the testing setup on the dielectric breakdown strength results.
Advancements in pressure-assisted sintering technology for low temperature co-fired ceramics (LTCC)
(2016)
Steadily increasing demands on design and dimensional accuracy of ceramic multilayer modules, as well as the processing of new materials, require continuous improvements of manufacturing technology, especially thermal processes. The capabilities of pressure-assisted sintering (PAS) for the manufacturing of highly integrated low temperature co-fired ceramics (LTCC) multilayer have been considerably extended in the last years by procedural and device-related advancements. A lambda probe has been integrated in a sintering press prototype to monitor and control the process atmosphere. Thereby, the development of oxygen partial pressure during binder burnout of real modules can be observed. On the other hand, the oxygen partial pressure can be regulated during densification, for example to prevent diffusion of silver from circuit paths into the surrounding LTCC. Thin-film capable surfaces can be produced without post-processing by using setter plates made of glass-like carbon in an advanced PAS process under nitrogen. A newly developed advancement of this approach enables in-situ hot-embossing of LTCC during PAS by using structured glass-like carbon molds. The prototype press is further extended by a sensitive displacement transducer for monitoring the thickness shrinkage of real modules with an edge length of up to 8 inch.
Structuring of LTCC Substrates by a Combination of Pressure-Assisted Sintering and Hot-Embossing
(2015)
Druckunterstützendes Sintern glaskeramischer Komposite mit Opferfolie aus hexagonalem Bornitrid
(2015)
New Setter Materials for the Pressure-Assisted Sintering of Low Temperature Co-Fired Ceramics
(2015)
Prägeverfahren bieten eine interessante Alternative zur Strukturierung keramischer Folien und Laminate. Im Gegensatz zur etablierten Stanz- oder Laserbearbeitung von Einzelfolien sind damit einerseits Strukturtiefen realisierbar, die nicht einem Vielfachen der Einzelfoliendicke entsprechen, andererseits können Strukturierungsgrade erzielt werden, bei denen perforierte Einzelfolien nicht mehr handhabbar sind. Heißprägen grüner Folien und Laminate erfolgt bei Temperaturen um 130 °C mit Metallstempeln. Die plastische Verformung erfolgt zeitabhängig. Dabei sind die Fließeigenschaften des polymeren Binders der Grünfolie maßgeblich für die Konturtreue der Prägung. Randeinzug und Gründichtegradienten um den Eindruck können zu Defekten im Sintergefüge führen. Je nach Sinterverfahren muss die Schwindung der geprägten Struktur berücksichtigt werden, eine Kombination dieses Verfahrens mit zero-shrinkage Techniken ist aber möglich. Sinterprägen stellt eine Erweiterung der Drucksintertechnologie für glaskeramische Komposite dar. Dabei wird ein Pressstempel aus glasartigem Kohlenstoff während des Brandes in die erweichte Glasphase des Komposits gedrückt. Die Abformung erfolgt durch viskosen Fluss der Glasphase. Mit Kenntnis des Dichte- und Viskositätsverlaufs des Werkstoffs kann das Verfahren so gestaltet werden, dass die Pressform konturtreu abgeformt wird. Mittels Sinterprägen lassen sich auch erhabene Strukturen realisieren, wobei diese häufig eine erhöhte Porosität aufweisen.
Today, more than 12% of the primary energy is lost in the form of waste heat. Thermoelectric generators (TEGs) can convert waste heat directly into electrical power by utilizing the Seebeck effect. The performance of such a generator is defined by a dimensionless figure of merit ZT of the thermoelectric pairs and the resistance R of the metallic contacts between these pairs. The figure of merit of thermoelectric oxides is considerably smaller compared to semiconductors. Still, thermoelectric oxides like calcium cobaltite (Ca3Co4O9) are attractive for applications at elevated temperatures in air. In contrast to the established π-type architecture of common TEGs, tape casting and multilayer technology may be applied for cost-effective manufacturing of oxide TEGs. Promising demonstrations of multilayer TEGs have been published in the last years. Still, the development of reliable and scalable manufacturing processes and proper material combinations is necessary. The aim of our project is to evaluate the feasibility of low temperature co-fired ceramics (LTCC) technology for a practical manufacturing of oxide multilayer TEGs of Ca3Co4O9 (p-type) and calcium manganate (CaMnO3, n-type). Ca3Co4O9 exhibits an undesired phase decomposition at 926 °C. Because of that, the application of sintering strategies and interconnect concepts well known from LTCC technology is a promising approach. We present results of pressure-assisted sintering of Ca3Co4O9 multilayer at 900 °C and axial pressures of up to 7.5 MPa. Ca3Co4O9 was produced by solid state reaction of CaCO3 and cobalt(II,III)oxide at 900 °C. Green tapes were prepared by a doctor-blade process, manually stacked and laminated by uniaxial thermocompression. Sintering was conducted in a LTCC sintering press between SiC setter plates. The thickness shrinkage was recorded by an in-situ technique. After sintering under 7.5 MPa, the microstructure of the single phase material shows a high density of 95 % and an advantageous alignment of the platelet grains. This results in good electrical conductivity and a comparatively high ZT of 0.018 at room temperature. However, the lowering of CaMnO3 sintering temperature from above 1200 °C to below 920 °C remains a challenge. To select a proper metal paste for interconnections of an oxide TEG, several pastes have been investigated regarding contact resistance of internal and external (soldered) connections in a preliminary study. Commercial pastes containing Ag, Au, Au/Pt, Ag/Pd, and Ag/Pd/Bi were manually applied and post-fired on sintered test bars of Ca3Co4O9 and CaMnO3 at 900 °C for 2 h. All tested pastes formed mechanically stable metallization after firing. For resistance measurement, 4-wire method and a custom-made probe head were used. The contacts on Ca3Co4O9 exhibit significantly (2-sample t-test, α = 5%) higher resistance compared to contacts on CaMnO3. Pure silver paste exhibits the lowest resistance for internal contacts on both materials, lower than 5 mΩ on CaMnO3. Ag/Pd/Bi paste resulted in conspicuously high variance of resistance. EDX analyses clarified an enrichment of Bi in the thermoelectric material near the interface and thereby the formation of an oxide layer with probably high electrical resistance. The thickness of that layer varies with the thickness of metallization. In conclusion, the use of Bi containing pastes is not advisable. Pure Ag paste shows the best results regarding resistance and solderability.
Dielectric strength testing of ceramics is simple and yet challenging. The execution of a breakthrough voltage measurement of a given sample is fast and straightforward. ASTM D149 describes the standardized procedure. But, there are versatile effects of test conditions and sample properties that affect the result of such a measurement. As one example, ASTM D149 allows different sizes of test electrodes and does not unambiguously prescribe the condition of the electrodes. Thus, different electrode configurations are used in the field. We conducted several test series on alumina samples to comprehensively quantify the effect of test conditions and sample properties on dielectric strength results. In our study, testing of alumina substrates using different electrode configurations resulted in differences of mean values of up to 20%. Further test series on alumina focused on the effect of voltage ramp rate. The results are complemented by calculations of failure probability at different voltage levels and corresponding withstand voltage tests. We conclude that a communication and comparison of single dielectric strength values is insufficient and may be misleading. A meaningful comparison of dielectric strength studies from different sources requires a thorough consideration of test conditions.
Practical breakdown voltage calculations using dielectric breakdown strength reference values
(2020)
Dielectric breakdown is a catastrophic failure of ceramic substrates and insulators. The use of dielectric breakdown strength (DBS) reference values for the dimensioning of such components is not straightforward, as the DBS depends on sample thickness and electrode area. This fact also hampers a valid comparison of data taken from different literature sources. Based on the empirically confirmed proportionality of DBS to the reciprocal square root of sample thickness and an approach to account for the influence of electrode area on the failure probability, a practical equation is derived to calculate the breakdown voltage for arbitrary sample thickness and electrode area from one set of DBS reference data. To validate the equation, the AC DBS of commercial alumina substrates with thicknesses ranging from 0.3 mm to 1.0 mm was performed using different printed electrodes with varying areas. The breakdown voltages comprise a range from 18 kV for thick samples to 8.5 kV for thin samples, resulting in DBS values from 17 kV/mm for 1.0 mm thick samples to 29 kV/mm for 0.3 mm thin samples, all made from the same material. The influence of electrode area is comparatively smaller. The results calculated with the proposed equation are in reasonable accordance with the measured data. Thus, the equation can be applied for a proper comparison of literature DBS data measured in different setups and for a reasonable estimation of breakdown voltages in DBS tests and applications based on reference data.
Glass-ceramic composite multilayer structures - modeling of densification and shrinkage mismatch
(2016)
Low temperature co-fired ceramics (LTCC) are glass-ceramic composites that are processed by tape casting and multilayer technology to create multilayer circuit boards and electronic packages for high frequency applications, microsystems, and sensors. Pressure-assisted sintering (PAS) enables the densification of LTCC without lateral shrinkage, and thereby the manufacturing of miniaturized modules with minimal shrinkage tolerances. Co-firing of LTCC with other functional ceramics facilitates the implementation of innovative module concepts. The master sintering curve model is a useful tool to supplement the empirical optimization of such sintering processes. Two applications of the model are presented. Firstly, an algorithm is deduced that allows the simulation of shrinkage mismatch in a combined multilayer structure. Based on this simulation, an optimized process for the co-firing of LTCC and ferrite is derived. Secondly, the pressure-assisted sintering of LTCC is modeled. A comprehensive description of the densification behavior of LTCC during PAS is thereby possible.
The ProboStat is a multi-purpose measurement cell suitable for various electrical and physical measurements under different atmospheres and at high temperatures. Disc and bar shaped samples are sandwiched between platinum electrodes at the top of the tubular cell. The gas tight assembly can be inserted into a furnace. Different gases can be flushed through the tube. For this study, a ProboStat was adapted to measure volume resistivity of ceramic insulators at high temperatures according to standards.
The standardized measurement of volume resistivity of ceramic insulators requires the consideration of many specifications including sample diameter, thickness, electrode design, and the proportion of these characteristics. Measurements are ideally performed in a state of dielectric equilibrium. The time-related slope of resistivity of a specific sample follows a power function. Thus, care must be taken when choosing a charge time or defining the duration of a measurement. As fringing of the guarded electrode occurs under high voltage, the effective electrode area for evaluation of the results should be corrected with respect to sample thickness and electrode design. The demands of effective standards on sample geometry and electrode design are stricter for room temperature measurements than for high temperature measurements.
To perform high temperature measurements on ceramic samples that also fulfill the demands on room temperature measurements, a ProboStat was equipped with a dedicated large sample setup for discs with diameters of up to 60 mm. The volume resistivity of different alumina samples was first measured at room temperature in a standard test fixture and then compared to results obtained with the ProboStat. All measurements were performed for at least 100 min using a 26 mm guarded electrode. High temperature measurements at 500 °C were performed using the same samples. Room temperature values obtained with the standard test fixture are in the order of 10^17 Ohm·cm. The quantitative effect of electrode area correction is presented. Practical issues related to the use of the multi-purpose cell are addressed. These include electrode material selection, application of electrodes, and compensation of leakage currents. High temperature results of volume resistivity of the different alumina samples are presented. The validity is discussed with respect to the suitability of the multi-purpose cell for such measurements.
Ceramic springs offer versatile possibilities for load bearing or sensor applications in challenging environments. Although it may appear unexpected, a wide range of spring constants can be implemented by material selection and especially by the design of the spring. Based on a rectangular cross-section of the windings, it is possible to design a spring geometry that generates the desired spring constant simply by choosing appropriate diameter, height, widths, and number of windings. In a recent research project the calculation of helical compression springs made of rectangular steel (German standard DIN 2090) was applied for the design of ceramic springs. A manufacturing technology has been worked out to fabricate such springs from hollow cylinders of several highly dense technical ceramics by milling. Ceramic springs with precise rectangular section, without edge damage, and mean surface roughness smaller than 0.2 µm were produced after parameter optimization. Tolerances of less than 10 µm were achieved regarding spring diameter, height, and width of cross section. It is shown that the calculations outlined in the standard are valid for a variety of ceramic materials as well. Demonstrator springs with a wide range of spring constants have been fabricated, including zirconia springs with 0.02 N/mm, alumina springs with 1 N/mm and Si3N4 springs with 5 N/mm. A reproducibility study of six zirconia springs with a constant of 0.3 N/mm showed a relative difference in spring constants of less than +/- 1 %. This combination of a valid calculation approach for spring geometry and a reliable manufacturing technology allows for purposeful development and fabrication of ceramic springs with precise mechanical properties and superior chemical stability.
Dielectric breakdown of ceramics is widely believed to originate from microstructural defects. Still, there is no commonly accepted model for the origin and process of dielectric failure that covers all observed phenomena and dependencies. In analogy to mechanical strength, the Weibull distribution is commonly used to evaluate dielectric strength data. This works well for a given group of specimens with constant geometry. But unlike mechanical strength, dielectric strength scales with the inverse square root of sample thickness. This cannot be explained by the classic Weibull concept. The Griffith type energy release rate model of dielectric breakdown proposed by Schneider is based on space charge injection and conducting filaments from the sample surface. This model incorporates the distinct thickness dependence and the pronounced influence of surface defects. Based on this model and the classic Weibull probability of failure, Schneider’s group theoretically derived a probability of breakdown that predicts an increase of failure probability with increasing electrode area. In our study we tested this model with dielectric strength data measured on dense alumina samples using different electrode areas. Weibull modulus and characteristic dielectric strength (scale parameter) were determined for a set of measurements using small electrodes. These values were used to calculate the failure probability under large electrodes according to the model. The calculated data excellently fits the measured values. Thus, our experiments substantiate the assumptions made in the breakdown model and the significance of surface defects for dielectric failure.
Dielectric strength testing of ceramics can be performed with various setups and parameters. Comparisons of results from different sources are often not meaningful, because the results are strongly dependent on the actual testing procedure. The aim of this study is to quantify the influence of voltage ramp rate, electrode size, electrode conditioning, and sample thickness on the measured AC dielectric strength of a commercial alumina. Mean values, Weibull moduli, and failure probabilities determined in standardized short time tests are evaluated and related to withstand voltage tests. Dielectric strength values in the range from 21.6 to 33.2 kV/mm were obtained for the same material using different testing procedures. Short time tests resulted in small standard deviations (< 2 kV/mm) and high Weibull moduli around 30, while withstand tests at voltage levels with low and virtual zero failure probability in short time tests resulted in large scatter of withstand time and Weibull moduli < 1. The strong decrease in Weibull moduli is attributed to progressive damage from partial discharge and depolarization during AC testing. These findings emphasize the necessity of a thorough documentation of testing procedure and highlight the importance of withstand voltage tests for a comprehensive material characterization.
Ceramic springs combine attractive properties for applications in machinery, metrology, and sensor technology. They are electrically insulating, non-magnetic, provide a linear stress-strain behavior, and are stable at high temperatures and in corrosive environments. Generally, the precise dimensioning of a ceramic spring with respect to the spring constant is challenging. Different models are described, but many of these calculations do not match the actual spring properties. We demonstrate a reliable approach for the dimensioning and manufacturing of helical compression springs with a rectangular winding cross-section. Based on the German standard DIN 2090, which is referring to metallic springs, the spring constant can be calculated based on shear modulus, diameter, height, widths, and number of windings. Different ceramic springs were produced by milling of sintered hollow cylinders of zirconia, alumina and silicon nitride. The experimental spring constants are in very good agreement with the calculated values. Spring constants of zirconia springs were varied over three orders of magnitude between 0.02 N/mm and 5 N/mm by purposeful adaption of the spring geometry. The combination of dimensioning based on DIN 2090 and precise hard machining offers a reliable technology for the fabrication of tailored ceramic springs for special applications.