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Underwater plasma and glow discharge electrolysis are interesting new methods for polymer surface functionalization. The achievable content of O-containing functional groups exceeds that of oxygen glow discharge gas plasmas by a factor of two (up to ca. 56 O/100 C). The percentage of OH groups among all O-containing groups can reach 25 to 40%, whereas it is about 10% in the gas plasmas. Addition of hydrogen peroxide increases the fraction of OH groups to at most 70% (27 OH/100 C). The liquid plasma systems are also able to polymerize acrylic acid and deposit the polymer as very thin film on substrate surfaces or membranes, thereby retaining about 80% of all COOH functional groups (27 COOH/100 C).