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Need for large-area EDS detectors for imaging nanoparticles in a SEM operating in transmission mode
(2014)
In the frame of the European project NanoValid, potential candidates of reference nanomaterials are manufactured and systematically characterized in particular with respect to their morphology (shape, size and size distribution). In this study, by exploiting the transmission operation mode in a high-resolution SEM, known as transmission SEM, the potential of this methodical approach is demonstrated by means of representative examples of nanoparticles. The method enables quick and accurate morphological inspection and systematic characterization. Energy dispersive X-ray spectroscopy imaging of single nanoparticles by using the transmission mode is demonstrated as feasible, too.
High-priority industrial nanomaterials like SiO2, TiO2, and Ag are being characterized on a systematic basis within the framework of the EU FP7 research project NanoValid. Silica nanoparticles from an industrial source have been analyzed by Auger electron spectroscopy. Point, line, and map spectra were collected. Material specific and methodological aspects causing the special course of Auger line scan signals will be discussed.