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This manuscript reviews the most used optical systems for X-ray microprobes and summarizes the experiences in research with synchrotron radiation as well as with X-ray tube generators.
The need for smaller beam spot sizes for various applications and the unique properties of X-rays have induced a remarkable and fast development in X-ray optical systems. These systems are divided into three main categories: diffractive, reflective and refractive. Examples of the three will be covered in this paper, highlighting the properties that allow having spot sizes down to sub-micrometer regime.
However, the extraordinary capabilities of such systems are always relative. Therefore, an overview of the techniques that use such optical systems will be given, emphasizing their applicability on several case studies.
A single-bounce capillary with an ellipsoidal shape has been used for two-step focusing in combination with a Fresnel zone plate (FZP). The FZP serves as a first microfocusing element and produces a demagnified micrometer image of the source, before the elliptical capillary makes a last final compression of the beam. With 15 keV X-rays from the European Synchrotron Radiation Facility BM5 bending magnet, the two-step demagnification system produced a focus of about 250 nm with a gain of more than 1000. The use of an ellipsoidal capillary as a micro-mirror under off-axis illumination using micro-prefocusing optics might open up new opportunities in nanofocusing developments.